EP 0695432 A1 19960207 - SCATTERED-LIGHT LASER MICROSCOPE
Title (en)
SCATTERED-LIGHT LASER MICROSCOPE
Title (de)
LASERSTREULICHTMIKROSKOP
Title (fr)
MICROSCOPE LASER A LUMIERE DIFFUSEE
Publication
Application
Priority
- DE 9400419 W 19940419
- DE 4313094 A 19930422
Abstract (en)
[origin: US5764364A] PCT No. PCT/DE94/00419 Sec. 371 Date Mar. 21, 1996 Sec. 102(e) Date Mar. 21, 1996 PCT Filed Apr. 19, 1994 PCT Pub. No. WO94/24600 PCT Pub. Date Oct. 27, 1994The invention relates to a method for laser-microscopic magnification of objects, and to a device for implementing the method. In particular, organic, elastic or insulating objects, as well as their surface structures, can be examined down to the nanometer range by this method in a contactless manner and without preparation, and the optical signals generated can be processed with little technical effort. To this end, the specimens are irradiated with a laser beam which has previously been expanded to a larger beam diameter via an expanding lens system (3) and subsequently focused to the smallest possible beam diameter by means of a focusing lens (5) of short focal length. The object can be screened in this context. The intensity of the reflected light and scattered light (6) is detected at a very large solid angle, preferably on the inner surface of one of two hemispherical bowls with direct or indirect photosensors. Optical fibers can be used as photosensors.
IPC 1-7
IPC 8 full level
G01N 33/483 (2006.01); G01N 21/27 (2006.01); G01N 33/49 (2006.01); G01Q 60/18 (2010.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01)
CPC (source: EP US)
B82Y 20/00 (2013.01 - US); B82Y 35/00 (2013.01 - US); G01Q 60/22 (2013.01 - EP US); G02B 21/0012 (2013.01 - EP US); G02B 21/06 (2013.01 - EP US)
Citation (search report)
See references of WO 9424600A1
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IT LI NL PT SE
DOCDB simple family (publication)
US 5764364 A 19980609; DE 4313094 A1 19941027; EP 0695432 A1 19960207; JP H09500218 A 19970107; WO 9424600 A1 19941027
DOCDB simple family (application)
US 53520795 A 19951218; DE 4313094 A 19930422; DE 9400419 W 19940419; EP 94912459 A 19940419; JP 52262494 A 19940419