EP 0695438 A1 19960207 - METHOD AND APPARATUS FOR PROCESS CONTROL
Title (en)
METHOD AND APPARATUS FOR PROCESS CONTROL
Title (de)
VORRICHTUNG UND VERFAHREN ZUR PROZESSKONTROLLE
Title (fr)
PROCEDE ET APPAREIL DE COMMANDE D'UN PROCESSUS
Publication
Application
Priority
- GB 9400720 W 19940405
- GB 9307239 A 19930407
Abstract (en)
[origin: WO9423343A1] In order to investigate the development of a photoresist layer (2) on an optical master disk (1) by developing fluid (14), a transparent body (4, 35, 50) is brought into contact with the developing fluid (14). A light beam (6) is then incident on the optical master disk (1) from a source (5) and a diffracted beam (8) passes through the developing fluid (14) and the transparent body (4, 35, 50) to a detector (9). In this way the optical path of the diffracted beam (8) is stable. Preferably, the diffracted beam (8) is generated from the incident light beam (6) by reflection, and preferably it is a first-order diffracted beam. It is also preferable that the incident light beam (6) is modulated. The development of the photoresist layer is then monitored by monitoring changes in the diffracted light beam (8) detected by the detector (9).
IPC 1-7
IPC 8 full level
G01N 21/88 (2006.01); G01B 11/30 (2006.01); G01N 21/95 (2006.01); G03F 7/30 (2006.01); G11B 7/26 (2006.01)
CPC (source: EP)
G03F 7/3028 (2013.01); G11B 7/261 (2013.01)
Citation (search report)
See references of WO 9423343A1
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9423343 A1 19941013; AU 6384194 A 19941024; AU 675125 B2 19970123; BR 9406451 A 19960102; CA 2159100 A1 19941013; CN 1120866 A 19960417; CZ 257195 A3 19960911; CZ 283292 B6 19980218; EP 0695438 A1 19960207; FI 954769 A0 19951006; FI 954769 A 19951006; GB 9307239 D0 19930602; HU 9502729 D0 19951128; HU T73543 A 19960828; IL 109238 A0 19940731; IL 109238 A 19970713; JP H08508602 A 19960910; NO 953933 D0 19951003; NO 953933 L 19951003; NZ 263235 A 19960726; RU 2107893 C1 19980327; SG 44328 A1 19971219; TW 255966 B 19950901
DOCDB simple family (application)
GB 9400720 W 19940405; AU 6384194 A 19940405; BR 9406451 A 19940405; CA 2159100 A 19940405; CN 94191725 A 19940405; CZ 257195 A 19940405; EP 94911284 A 19940405; FI 954769 A 19951006; GB 9307239 A 19930407; HU 9502729 A 19940405; IL 10923894 A 19940406; JP 52186894 A 19940405; NO 953933 A 19951003; NZ 26323594 A 19940405; RU 95121761 A 19940405; SG 1995001399 A 19940405; TW 83102979 A 19940406