EP 0697069 B1 20000524 - FRICTION VACUUM PUMP WITH PUMP SECTIONS OF DIFFERENT DESIGNS
Title (en)
FRICTION VACUUM PUMP WITH PUMP SECTIONS OF DIFFERENT DESIGNS
Title (de)
REIBUNGSVAKUUMPUMPE MIT UNTERSCHIEDLICH GESTALTETEN PUMPENABSCHNITTEN
Title (fr)
POMPE A VIDE ROTATIVE A FRICTION COMPORTANT DES SECTIONS DE CONCEPTION DIFFERENTE
Publication
Application
Priority
- DE 4314418 A 19930503
- EP 9401011 W 19940331
Abstract (en)
[origin: WO9425760A1] The invention relates to a friction vacuum pump (1) with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the siegbahn stages are formed by facing surfaces of a rotor disc and a stator disc (16, 17). To simplify the production of such a pump, it is proposed that the stator discs (16) have spiral grooves (19).
IPC 1-7
IPC 8 full level
F04D 17/16 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP US)
F04D 17/168 (2013.01 - EP US); F04D 19/04 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 23/008 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
DE 4314418 A1 19941110; DE 59409375 D1 20000629; EP 0697069 A1 19960221; EP 0697069 B1 20000524; EP 0874159 A2 19981028; EP 0874159 A3 19981118; JP H08511071 A 19961119; US 5695316 A 19971209; WO 9425760 A1 19941110
DOCDB simple family (application)
DE 4314418 A 19930503; DE 59409375 T 19940331; EP 9401011 W 19940331; EP 94913098 A 19940331; EP 98110191 A 19940331; JP 52380194 A 19940331; US 54564695 A 19951030