EP 0700318 B1 19970716 - CLEANING PROCESS
Title (en)
CLEANING PROCESS
Title (de)
Reiningungsverfahren
Title (fr)
PROCEDE DE NETTOYAGE
Publication
Application
Priority
- EP 94913618 A 19940420
- EP 9401241 W 19940420
- EP 93201142 A 19930420
Abstract (en)
[origin: WO9423852A1] The invention relates to a process for cleaning substrate with acoustic energy by using degassed wash liquor. Degassed wash liquor can for example be achieved by adding gas whereafter a gas-to-non-gas system is activated.
IPC 1-7
IPC 8 full level
A47L 15/13 (2006.01); B08B 3/12 (2006.01); C11D 7/08 (2006.01); C11D 7/12 (2006.01); D06F 19/00 (2006.01)
CPC (source: EP US)
A47L 15/0002 (2013.01 - EP US); B08B 3/12 (2013.01 - EP); D06F 19/00 (2013.01 - EP US); A47L 2601/17 (2013.01 - EP)
Designated contracting state (EPC)
CH DE ES FR GB IT LI NL SE
DOCDB simple family (publication)
WO 9423852 A1 19941027; AU 6569894 A 19941108; DE 69404304 D1 19970821; DE 69404304 T2 19980108; EP 0700318 A1 19960313; EP 0700318 B1 19970716; ES 2105695 T3 19971016; JP H08508932 A 19960924
DOCDB simple family (application)
EP 9401241 W 19940420; AU 6569894 A 19940420; DE 69404304 T 19940420; EP 94913618 A 19940420; ES 94913618 T 19940420; JP 52278594 A 19940420