EP 0700485 B1 19970813 - MICROVALVE
Title (en)
MICROVALVE
Title (de)
MIKROVENTIL
Title (fr)
MICROVANNE
Publication
Application
Priority
- DE 9400599 W 19940521
- DE 4317676 A 19930527
Abstract (en)
[origin: DE4418450A1] The present invention relates to a microvalve which can be used, in particular, as a pilot valve in pneumatic control systems. The solenoid valves used hitherto in this area can be miniaturised only at the expense of a considerable increase in costs. The microvalve according to the invention comprises a first, discharge-side part (1) with a diaphragm structure (3) as a movable closing element and a second part (2) with an outlet opening (7) and a valve seat (5). The diaphragm structure is provided with heating elements so that, upon heating, the diaphragm flexes counter to the applied pressure. At least one of the two parts has pits of defined depth (6), which are arranged in such a way that, when the valve is closed, cavities are formed which are heated by the heating elements. To assist the opening functions of the valve, the diaphragm can be coated with a material which has a different thermal coefficient of longitudinal expansion than the diaphragm material. The microvalve described can be manufactured at a reasonable cost using semiconductor technology and its combined thermomechanical/thermopneumatic action provides improved operating characteristics. <IMAGE>
IPC 1-7
IPC 8 full level
F16K 1/00 (2006.01); F15B 21/08 (2006.01); F15C 3/04 (2006.01); F15C 5/00 (2006.01); F16K 31/64 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP US)
F15C 3/04 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE FR GB IT LI NL
DOCDB simple family (publication)
US 5681024 A 19971028; AT E156895 T1 19970815; DE 4418450 A1 19941201; DE 4418450 C2 19960725; DE 59403742 D1 19970918; EP 0700485 A1 19960313; EP 0700485 B1 19970813; JP 3418741 B2 20030623; JP H09501265 A 19970204; WO 9428318 A1 19941208
DOCDB simple family (application)
US 55691195 A 19951120; AT 94916136 T 19940521; DE 4418450 A 19940526; DE 59403742 T 19940521; DE 9400599 W 19940521; EP 94916136 A 19940521; JP 50010695 A 19940521