EP 0708976 A1 19960501 - PROCESS FOR OPERATING A TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETER
Title (en)
PROCESS FOR OPERATING A TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETER
Title (de)
VERFAHREN ZUM BETREIBEN EINES FLUGZEIT-SEKUNDÄRIONEN-MASSENSPEKTROMETERS
Title (fr)
PROCEDE D'EXPLOITATION D'UN SPECTROMETRE DE MASSE POUR IONS SECONDAIRES FONCTIONNANT PAR MESURE DU TEMPS DE VOL
Publication
Application
Priority
- DE 4416413 A 19940510
- EP 9501767 W 19950510
Abstract (en)
[origin: DE4416413A1] The invention pertains to a process for operating a time-of-flight secondary ion mass spectrometer for analysis of mass spectra, wherein a number of finely structured mass ranges appear in isolation at major intervals, involving the following steps: a) a surface of a material sample is bombarded with primary ion pulses that follow each other at regular time intervals tz (cycle time), b) the secondary ions of various masses m released from the material sample surface by the primary ions are accelerated to the same energy, c) the mas-dependent time of flight t is measured over a path 1 and the mass is determined therefrom. To increase the resolution and the signal-to-noise ratio the process is characterized in that: d) each primary ion pulse consists of a number of subpulses, e) each subpulse is so narrow that it allows for resolution of the finely structured mass ranges, f) the interval tB between the subpulses is greater than the width of the finely structured mass ranges, g) the number n of subpulses is selected so that n.tB is smaller than the intervals between the finely structured mass ranges, h) the n subpulse spectra of each finely structured mass range are added up.
IPC 1-7
IPC 8 full level
G01N 23/225 (2006.01); G01Q 60/44 (2010.01); H01J 37/252 (2006.01); H01J 49/40 (2006.01)
CPC (source: EP US)
H01J 49/40 (2013.01 - EP US)
Citation (search report)
See references of WO 9531000A1
Designated contracting state (EPC)
FR GB SE
DOCDB simple family (publication)
DE 4416413 A1 19951123; DE 4416413 C2 19960328; EP 0708976 A1 19960501; EP 0708976 B1 19971112; JP 3358065 B2 20021216; JP H09500486 A 19970114; US 5633495 A 19970527; WO 9531000 A1 19951116
DOCDB simple family (application)
DE 4416413 A 19940510; EP 9501767 W 19950510; EP 95920015 A 19950510; JP 52869795 A 19950510; US 57864696 A 19960209