EP 0710161 A1 19960508 - POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES
Title (en)
POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES
Title (de)
NACHBEHANDLUNG EINES BESCHICHTETEN SUBSTRATES MIT EINEM ANGEREGTES HALOGEN ENTHALTENDEN GAS FÜR DIE BESEITIGUNG VON RÜCKSTÄNDEN
Title (fr)
POST-TRAITEMENT D'UN SUBSTRAT PORTANT UN REVETEMENT, AVEC UN GAZ CONTENANT UN HALOGENE ACTIVE POUR ENLEVER DES RESIDUS
Publication
Application
Priority
- US 9407751 W 19940712
- US 9241793 A 19930716
Abstract (en)
[origin: WO9502472A1] Material that has previously been subjected to a removal treatment is removed from a substrate by being contacted with a gas containing an excited halogen at a pressure of greater than 50 torr.
IPC 1-7
B08B 3/12; B08B 5/00; B08B 6/00; B08B 7/00; B08B 7/02; B08B 7/04; C03C 23/00; C23G 1/00; G03C 5/00
IPC 8 full level
G03F 7/36 (2006.01); B08B 3/02 (2006.01); B08B 5/00 (2006.01); B08B 6/00 (2006.01); C03C 17/32 (2006.01); C03C 23/00 (2006.01); C23F 1/00 (2006.01); C23F 1/12 (2006.01); C23F 4/00 (2006.01); C23G 5/00 (2006.01); G03F 7/42 (2006.01); H01L 21/302 (2006.01); H01L 21/306 (2006.01); H01L 21/311 (2006.01); H05K 3/26 (2006.01)
CPC (source: EP)
C03C 17/32 (2013.01); C03C 23/00 (2013.01); G03F 7/42 (2013.01); H01L 21/02046 (2013.01); H01L 21/31138 (2013.01); C03C 2218/328 (2013.01)
Designated contracting state (EPC)
DE
DOCDB simple family (publication)
WO 9502472 A1 19950126; DE 710161 T1 19970130; EP 0710161 A1 19960508; EP 0710161 A4 19970416; JP H09502646 A 19970318
DOCDB simple family (application)
US 9407751 W 19940712; DE 94922123 T 19940712; EP 94922123 A 19940712; JP 50465295 A 19940712