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EP 0711430 A1 19960515 - MASS FLOW CONTROLLER

Title (en)

MASS FLOW CONTROLLER

Title (de)

VORRICHTUNG ZUR MASSENSTROMSTEUERUNG

Title (fr)

REGULATEUR DE FLUX MASSIQUE

Publication

EP 0711430 A1 19960515 (EN)

Application

EP 93916478 A 19930610

Priority

US 9305542 W 19930610
US 89819592 A 19920612

Abstract (en)

[origin: WO9325950A1] A mass flow controller (10) includes a base bypass block (12) having a flow rate sensor unit (18) connected thereto. The flow sensor (18) generates a flow signal in response to a flow of gas therethrough. A set point signal is received and combined with an internally generated set point correction signal to produce a corrected set point signal. The corrected set point signal is compared with the flow signal to produce an error signal. The error signal is used to drive a valve (20) connected to the bypass block (12) to control the flow of gas.

IPC 1-7

G05D 16/20

IPC 8 full level

G05D 7/06 (2006.01)

CPC (source: EP)

G05D 7/0635 (2013.01)

Designated contracting state (EPC)

DE FR GB IT NL SE

DOCDB simple family (publication)

WO 9325950 A1 19931223; EP 0711430 A1 19960515; EP 0711430 A4 19960104

DOCDB simple family (application)

US 9305542 W 19930610; EP 93916478 A 19930610