EP 0714455 A1 19960605 - DEVICE FOR DEPOSITING DIAMOND-LIKE CARBON FILMS ON A SUBSTRATE
Title (en)
DEVICE FOR DEPOSITING DIAMOND-LIKE CARBON FILMS ON A SUBSTRATE
Title (de)
EINRICHTUNG ZUR AUFBRINGUNG DIAMANTARTIGER KOHLENSTOFFSCHICHTEN AUF EIN SUBSTRAT
Title (fr)
DISPOSITIF PERMETTANT D'APPLIQUER DES COUCHES DE CARBONE DIAMANTEES SUR UN SUBSTRAT
Publication
Application
Priority
- AT 9400116 W 19940818
- AT 170793 A 19930825
- DE 9313168 U 19930901
Abstract (en)
[origin: WO9506143A1] The invention pertains to a device for thermal dissociation of gases and a device for depositing diamond-like carbon films on a substrate (3), with an evacuatable reaction chamber (1) to hold the substrate (3), with at least one gas inlet (7) for feeding a reactant gas into the reaction chamber and with a device for activating the reactant gas. A separate heating apparatus (9, 10, 11) heats at least one part of the inner wall of the inlet (7). The invention also pertains to a device for thermal dissociation of gases.
IPC 1-7
IPC 8 full level
B01J 19/08 (2006.01); B01J 19/12 (2006.01); C23C 16/27 (2006.01); C23C 16/452 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01)
CPC (source: EP)
B01J 19/088 (2013.01); B01J 19/121 (2013.01); B01J 19/126 (2013.01); C23C 16/271 (2013.01); C23C 16/452 (2013.01); C23C 16/4557 (2013.01)
Citation (search report)
See references of WO 9506143A1
Designated contracting state (EPC)
AT CH DE FR GB IT LI NL SE
DOCDB simple family (publication)
WO 9506143 A1 19950302; AU 7377094 A 19950321; EP 0714455 A1 19960605
DOCDB simple family (application)
AT 9400116 W 19940818; AU 7377094 A 19940818; EP 94923584 A 19940818