EP 0714774 B1 19980708 - Method for making micromechanical nozzles or liquid jets
Title (en)
Method for making micromechanical nozzles or liquid jets
Title (de)
Verfahren zur Herstellung micromechanischer Düsen oder Flüssigkeitsstrahlen
Title (fr)
Procédé de fabrication micromécanique de buses ou jets de liquide
Publication
Application
Priority
FR 9414461 A 19941201
Abstract (en)
[origin: EP0714774A1] The method consists of forming at least one groove (110) in the surface (112) of a first substrate (114), assembling the first substrate with a second substrate (116) which covers the groove and forms a channel, and forming a protective coating on the inside of the channel by thermal oxidation of its walls. The first and second substrates are then cut perpendicular to the channel to form the nozzle (118) for the liquid jet, and the interior protective coating is removed. The two substrates can be machined to form an orifice (140) and/or a reservoir for feeding the nozzles. The first and second substrates are made from silicium, and the inner coating is of silicium oxide, which is removed in a hydrofluoric acid bath.
IPC 1-7
IPC 8 full level
B41J 2/135 (2006.01); B41J 2/16 (2006.01)
CPC (source: EP US)
B41J 2/1606 (2013.01 - EP US); Y10T 29/49401 (2015.01 - EP US)
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
EP 0714774 A1 19960605; EP 0714774 B1 19980708; DE 69503340 D1 19980813; DE 69503340 T2 19990211; FR 2727648 A1 19960607; FR 2727648 B1 19970103; JP H08216415 A 19960827; US 5781994 A 19980721
DOCDB simple family (application)
EP 95402686 A 19951129; DE 69503340 T 19951129; FR 9414461 A 19941201; JP 31448595 A 19951201; US 56460095 A 19951129