EP 0719978 A2 19960703 - A process for distributing ultra high purity gases with minimized corrosion
Title (en)
A process for distributing ultra high purity gases with minimized corrosion
Title (de)
Verfahren zum Verteilen von ultrareinen Gasen mit minimierter Korrosion
Title (fr)
Procédé pour distribuer des gaz à ultra haute pureté avec corrosion minimisée
Publication
Application
Priority
- US 36646894 A 19941230
- US 50686795 A 19950725
Abstract (en)
A process for reducing corrosion in a gas distribution network of ultra high purity gas or any part of said distribution network, comprising: (a) Wet cleaning the gas distribution network or at least one part thereof with a wet cleaning agent, (b) Liquid drying said gas distribution network or said at least one part thereof with an H2O desorbing liquid drying agent selected from the group consisting of acetone dimethylacetal DMP, 2.2 dichloropropane DCP or 2.2 dibromopropane DBP, mixtures thereof and any equivalent thereof, (c) purging said gas distribution network or any said part thereof with a dry high purity gas comprising less than 1 ppm of any impurity, and (d) evacuating said gas distribution network or any said part thereof at a pressure which is lower than 5x10<4> Pascal (e) exposing said gas distribution network or said any part thereof to an atmosphere comprising an ultra high purity corrosive gas or air.
IPC 1-7
IPC 8 full level
B08B 9/00 (2006.01); B08B 9/02 (2006.01); F17C 9/00 (2006.01)
CPC (source: EP)
B08B 9/00 (2013.01); B08B 9/032 (2013.01); B08B 9/0321 (2013.01); B08B 9/0323 (2013.01); F17C 9/00 (2013.01); F17C 2205/0326 (2013.01); F17C 2205/0335 (2013.01); F17C 2205/0341 (2013.01); F17C 2221/05 (2013.01); F17C 2227/0135 (2013.01); F17C 2227/044 (2013.01); F17C 2250/043 (2013.01); F17C 2260/053 (2013.01); F17C 2265/012 (2013.01)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0719978 A2 19960703; EP 0719978 A3 19970502; EP 0719978 B1 20011024; DE 69523428 D1 20011129; DE 69523428 T2 20020711
DOCDB simple family (application)
EP 95402914 A 19951222; DE 69523428 T 19951222