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EP 0722564 A1 19960724 - METHOD OF MANUFACTURING A GAS SENSOR

Title (en)

METHOD OF MANUFACTURING A GAS SENSOR

Title (de)

VERFAHREN ZUR HERSTELLUNG EINES GASSENSORS

Title (fr)

PROCEDE DE FABRICATION D'UN DETECTEUR DE GAZ

Publication

EP 0722564 A1 19960724 (DE)

Application

EP 95927641 A 19950807

Priority

DE 9501035 W 19950807
DE 4428155 A 19940809

Abstract (en)

[origin: DE4428155A1] In order to increase the conductivity of gas sensors used for detecting reducing gases, a Ga2O3 layer (A) is applied to a substrate (S) to act as the gas-sensitive layer and tempered at a temperature of between 750 and 850 DEG C to ensure that the Ga2O3 layer is free of acceptors.

IPC 1-7

G01N 27/12

IPC 8 full level

G01N 27/12 (2006.01)

CPC (source: EP)

G01N 27/12 (2013.01)

Citation (search report)

See references of WO 9605507A1

Designated contracting state (EPC)

DE FR GB IT

DOCDB simple family (publication)

DE 4428155 A1 19960215; DE 4428155 C2 19961219; EP 0722564 A1 19960724; WO 9605507 A1 19960222

DOCDB simple family (application)

DE 4428155 A 19940809; DE 9501035 W 19950807; EP 95927641 A 19950807