Global Patent Index - EP 0726590 A2

EP 0726590 A2 19960814 - Method for forming a field emission cold cathode

Title (en)

Method for forming a field emission cold cathode

Title (de)

Herstellungsverfahren einer Feldemissionskaltkathode

Title (fr)

Procédé de fabrication d'une cathode froide à émission de champ

Publication

EP 0726590 A2 19960814 (EN)

Application

EP 96102013 A 19960212

Priority

JP 2358295 A 19950213

Abstract (en)

The present invention provides a method for reshaping up a cone-like electrode (3) which is made of a refractory metal containing silicon. The method comprises the following steps. A surface of the cone-like electrode (3) is subjected to an oxidation of silicon which is contained in the refractory metal. The oxidation is generated at rates which increase toward a top portion of the cone-like electrode. As a result, a silicon oxide film (9) is formed, which coats the cone-like electrode (3). The silicon oxide film (9) has thickness which gradually increase toward a bottom portion of the cone-like electrode (3). An interface between the silicon oxide film (9) and the cone-like electrode (3) has sloped angles which increase toward the top portion. The silicon oxide film (9) is removed to thereby expose a reshaped cone electrode (3) which has a sharply pointed top. The reshaped cone electrode (3) has a surface having sloped angles which increase toward the sharply pointed top. <IMAGE>

IPC 1-7

H01J 9/02

IPC 8 full level

H01J 1/30 (2006.01); H01J 1/304 (2006.01); H01J 9/02 (2006.01)

CPC (source: EP KR)

H01J 1/304 (2013.01 - KR); H01J 9/02 (2013.01 - KR); H01J 9/025 (2013.01 - EP); H01J 2209/0226 (2013.01 - EP)

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

EP 0726590 A2 19960814; EP 0726590 A3 19961211; EP 0726590 B1 19990407; DE 69601961 D1 19990512; DE 69601961 T2 19991014; JP H08222126 A 19960830; KR 0181326 B1 19990320; KR 960032553 A 19960917

DOCDB simple family (application)

EP 96102013 A 19960212; DE 69601961 T 19960212; JP 2358295 A 19950213; KR 19960003445 A 19960213