EP 0731974 A1 19960918 - METHOD FOR THE MANUFACTURE OF A CAPACITOR AND CAPACITOR OBTAINED
Title (en)
METHOD FOR THE MANUFACTURE OF A CAPACITOR AND CAPACITOR OBTAINED
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES KONDENSATORS UND AUF DIESE WEISE HERGESTELLTER KONDENSATOR
Title (fr)
PROCEDE DE FABRICATION DE CONDENSATEUR ET CONDENSATEUR ISSU D'UN TEL PROCEDE
Publication
Application
Priority
- FR 9401404 W 19941201
- FR 9314519 A 19931203
Abstract (en)
[origin: WO9515570A1] Method for the manufacture of a stacked-type capacitor consisting of alternating dielectric layers and conducting layers. The dielctric and conducting layers are deposited in succession. The dielectric layers are deposited by polymerization of elements derived from the dissociation, by remote nitrogen plasma, of an organo-siliceous or organo-germanium gas. The conducting layers are formed by deposition of conducting elements derived from the dissociation, by remote nitrogen plasma, of a precursor gas of the conducting elements.
IPC 1-7
IPC 8 full level
C23C 16/30 (2006.01); H01G 4/008 (2006.01); H01G 4/012 (2006.01); H01G 4/30 (2006.01); H01G 4/33 (2006.01)
CPC (source: EP KR)
H01F 38/28 (2013.01 - KR); H01G 4/0085 (2013.01 - EP); H01G 4/012 (2013.01 - EP); H01G 4/30 (2013.01 - EP)
Citation (search report)
See references of WO 9515570A1
Designated contracting state (EPC)
AT BE CH DE ES FR GB IE IT LI LU NL SE
DOCDB simple family (publication)
WO 9515570 A1 19950608; CA 2177987 A1 19950608; EP 0731974 A1 19960918; FI 962293 A0 19960531; FI 962293 A 19960722; FR 2713388 A1 19950609; FR 2713388 B1 19960126; JP H09505943 A 19970610; KR 960706683 A 19961209
DOCDB simple family (application)
FR 9401404 W 19941201; CA 2177987 A 19941201; EP 95902822 A 19941201; FI 962293 A 19960531; FR 9314519 A 19931203; JP 51545095 A 19941201; KR 19960702896 A 19960603