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Current content: 158 539 009 patent documents

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155 661 new documents added

1 150 346 documents amended

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EP 0736171 A1 19961009 - FAST SPECTROSCOPIC ELLIPSOMETER

Title (en)

FAST SPECTROSCOPIC ELLIPSOMETER

Title (de)

SCHNELLES SPEKTROSKOPISCHES ELLIPSOMETER

Title (fr)

ELLIPSOMETRE SPECTROSCOPIQUE RAPIDE

Publication

EP 0736171 A1 19961009 (DE)

Application

EP 95905090 A 19941220

Priority

DE 4343490 A 19931220
EP 9404235 W 19941220

Abstract (en)

[origin: WO9517662A1] A high-speed ellipsometric measuring process for any number and sequence of measuring light wavelengths, suitable especially for the in situ measurement of processes on a substrate surface. A broad-band radiation source (1) and an opto-acoustically tunable filter (4) which can be controlled by a PC (10) are used for fast wavelength selection.

IPC 1-7

G01N 21/21

IPC 8 full level

G01J 3/447 (2006.01); G01N 21/21 (2006.01)

CPC (source: EP)

G01J 3/447 (2013.01); G01N 21/211 (2013.01)

Citation (search report)

See references of WO 9517662A1

Designated contracting state (EPC)

DE FR

DOCDB simple family (publication)

DE 4343490 A1 19950622; EP 0736171 A1 19961009; WO 9517662 A1 19950629

DOCDB simple family (application)

DE 4343490 A 19931220; EP 9404235 W 19941220; EP 95905090 A 19941220