EP 0736789 B1 20030319 - Catadioptric optical system and exposure apparatus having the same
Title (en)
Catadioptric optical system and exposure apparatus having the same
Title (de)
Catadioptrisches System und dieses verwendender Belichtungsapparat
Title (fr)
Système catadioptrique et appareil d'exposition lumineuse utilisante ce système
Publication
Application
Priority
- JP 8238095 A 19950407
- JP 3097896 A 19960219
Abstract (en)
[origin: EP0736789A2] The present invention relates to a catadioptric projection optical system configured such that the diameter of its concave mirror can be reduced without deteriorating performances of the optical system and to an exposure apparatus including the same. The catadioptric optical system in accordance with the present invention comprises a first imaging optical system (G1) forming an intermediate image of a pattern on a first surface with a reduced magnification, including a first lens group with a positive refracting power and a second lens group (G12) which has a concave mirror (M1) and a negative lens component whose concave surface faces the first surface; a second imaging optical system (G2) forming an image of the intermediate image upon a second surface, a combined magnification of the first and second imaging optical systems being a reduction magnification; and a first optical path deflecting member (M2) disposed in an optical path from the first imaging optical system to the second imaging optical system so as to guide light from the first imaging optical system to the second imaging optical system. In particular, the first lens group (G11) of the first imaging optical system is disposed, while a part thereof is positioned between the first optical path deflecting member (M2) and the second lens group (G12), in a space through which both light directed from the first surface to the second lens group and light directed from the second lens group to the first optical path deflecting member pass, and includes, successively from the first surface toward the second lens group, a front lens group having a positive refracting power, an intermediate lens group having a negative refracting power, and a rear lens group having a positive refracting power. <IMAGE>
IPC 1-7
IPC 8 full level
G02B 17/08 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
G02B 17/08 (2013.01 - EP US); G02B 17/0856 (2013.01 - KR); G02B 17/0892 (2013.01 - EP US); G03F 7/70225 (2013.01 - EP US); G03F 7/70275 (2013.01 - EP US); G03F 7/70358 (2013.01 - EP US)
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
EP 0736789 A2 19961009; EP 0736789 A3 19970205; EP 0736789 B1 20030319; DE 69626712 D1 20030424; DE 69626712 T2 20031204; JP 3747958 B2 20060222; JP H08334695 A 19961217; KR 960038439 A 19961121; US 5689377 A 19971118
DOCDB simple family (application)
EP 96105452 A 19960404; DE 69626712 T 19960404; JP 3097896 A 19960219; KR 19960009936 A 19960403; US 62816596 A 19960405