EP 0737273 A1 19961016 - MICROPUMP
Title (en)
MICROPUMP
Title (de)
MIKROPUMPE
Title (fr)
MICROPOMPE
Publication
Application
Priority
- CH 387893 A 19931228
- IB 9400435 W 19941221
Abstract (en)
[origin: US5759015A] PCT No. PCT/IB94/00435 Sec. 371 Date Jun. 5, 1996 Sec. 102(e) Date Jun. 5, 1996 PCT Filed Dec. 21, 1994 PCT Pub. No. WO95/18307 PCT Pub. Date Jul. 6, 1995A micropump including two glass sheets (2, 8) with a machined silicon board (6) sealingly inserted therebetween. An inlet valve (12), a pumping chamber (50) and an outlet valve (28) are arranged between an inlet (10) and an outlet (4). A pump diaphragm (56) forming one wall of the pumping chamber comprises a thickened central portion (58) interacting with the upper sheet (8) to form an abutment restricting the suction movement of the diaphragm (50), and lower abutment elements (60) restricting the movement of the diaphragm when the fluid is discharged. A piezoelectric pad (72) engages the diaphragm by means of an intermediate part (84) to perform the pumping movement between upper and lower limits precisely defined by the abutments. A precisely defined and constant flow rate is thus achieved regardless of changes in the performance of the piezoelectric pad.
IPC 1-7
IPC 8 full level
F04B 43/04 (2006.01)
CPC (source: EP US)
F04B 43/046 (2013.01 - EP US)
Citation (search report)
See references of WO 9518307A1
Designated contracting state (EPC)
CH DE ES FR GB IT LI NL
DOCDB simple family (publication)
US 5759015 A 19980602; AU 1118095 A 19950717; AU 681470 B2 19970828; CA 2179063 A1 19950706; CA 2179063 C 20050215; DE 69410487 D1 19980625; DE 69410487 T2 19981105; EP 0737273 A1 19961016; EP 0737273 B1 19980520; JP 3718724 B2 20051124; JP H09507279 A 19970722; SG 44800 A1 19971219; WO 9518307 A1 19950706
DOCDB simple family (application)
US 64079796 A 19960605; AU 1118095 A 19941221; CA 2179063 A 19941221; DE 69410487 T 19941221; EP 95902252 A 19941221; IB 9400435 W 19941221; JP 51787595 A 19941221; SG 1996007796 A 19941221