Global Patent Index - EP 0741404 B1

EP 0741404 B1 20000112 - A method and an electrode system for excitation of a plasma

Title (en)

A method and an electrode system for excitation of a plasma

Title (de)

Verfahren und Elektrodenanordnung zur Anregung eines Plasmas

Title (fr)

Procédé d'excitation d'un plasma et système d'électrode pour sa mise en oeuvre

Publication

EP 0741404 B1 20000112 (EN)

Application

EP 96610018 A 19960502

Priority

NO 951682 A 19950502

Abstract (en)

[origin: EP0741404A1] A method for excitation of a plasma, characte-rized in that it comprises the step of subjecting a gas to an electric field generated by an electrode system comprising n electrodes, n being an integer greater than or equal to 3, preferably between 3 and 30, each of the n electrodes being connected to one of the following AC voltages: <MATH> <MATH> <MATH> <MATH> where: f is a frequency in the range of 10 to 10000 Hz, preferably 30 to 200 Hz, more preferably 50 to 60 Hz, U0 is a voltage in the range of 50 to 10000 V, at least one electrode being connected to Ur, at least one electrode being connected to Us and at least one electrode being connected to Ut. The invention also concerns an electrode system for carrying out the method and the use of the electrode system. <IMAGE>

IPC 1-7

H01J 37/32; H05H 1/46

IPC 8 full level

H01J 37/32 (2006.01); H05H 1/46 (2006.01)

CPC (source: EP)

H01J 37/32027 (2013.01); H01J 37/3266 (2013.01); H05H 1/46 (2013.01)

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE

DOCDB simple family (publication)

EP 0741404 A1 19961106; EP 0741404 B1 20000112; AT 188805 T 20000115; DE 69606087 D1 20000217; DE 69606087 T2 20000914; DK 0741404 T3 20000501; ES 2140812 T3 20000301; NO 302060 B1 19980112; NO 951682 D0 19950502; NO 951682 L 19961104; US 5935455 A 19990810

DOCDB simple family (application)

EP 96610018 A 19960502; AT 96610018 T 19960502; DE 69606087 T 19960502; DK 96610018 T 19960502; ES 96610018 T 19960502; NO 951682 A 19950502; US 64156596 A 19960501