EP 0741404 B1 20000112 - A method and an electrode system for excitation of a plasma
Title (en)
A method and an electrode system for excitation of a plasma
Title (de)
Verfahren und Elektrodenanordnung zur Anregung eines Plasmas
Title (fr)
Procédé d'excitation d'un plasma et système d'électrode pour sa mise en oeuvre
Publication
Application
Priority
NO 951682 A 19950502
Abstract (en)
[origin: EP0741404A1] A method for excitation of a plasma, characte-rized in that it comprises the step of subjecting a gas to an electric field generated by an electrode system comprising n electrodes, n being an integer greater than or equal to 3, preferably between 3 and 30, each of the n electrodes being connected to one of the following AC voltages: <MATH> <MATH> <MATH> <MATH> where: f is a frequency in the range of 10 to 10000 Hz, preferably 30 to 200 Hz, more preferably 50 to 60 Hz, U0 is a voltage in the range of 50 to 10000 V, at least one electrode being connected to Ur, at least one electrode being connected to Us and at least one electrode being connected to Ut. The invention also concerns an electrode system for carrying out the method and the use of the electrode system. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 37/32 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP US)
H01J 37/32027 (2013.01 - EP US); H01J 37/3266 (2013.01 - EP US); H05H 1/46 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI NL PT SE
DOCDB simple family (publication)
EP 0741404 A1 19961106; EP 0741404 B1 20000112; AT E188805 T1 20000115; DE 69606087 D1 20000217; DE 69606087 T2 20000914; DK 0741404 T3 20000501; ES 2140812 T3 20000301; NO 302060 B1 19980112; NO 951682 D0 19950502; NO 951682 L 19961104; US 5935455 A 19990810
DOCDB simple family (application)
EP 96610018 A 19960502; AT 96610018 T 19960502; DE 69606087 T 19960502; DK 96610018 T 19960502; ES 96610018 T 19960502; NO 951682 A 19950502; US 64156596 A 19960501