EP 0741909 A1 19961113 - METHODS FOR IMPROVING SEMICONDUCTOR PROCESSING
Title (en)
METHODS FOR IMPROVING SEMICONDUCTOR PROCESSING
Title (de)
METHODEN ZUR VERBESSERUNG DER HALBLEITERHERSTELLUNG
Title (fr)
PROCEDES D'AMELIORATION DES TRAITEMENTS DE SEMI-CONDUCTEURS
Publication
Application
Priority
- US 9500131 W 19950112
- US 22945094 A 19940127
- US 26692994 A 19940627
Abstract (en)
[origin: WO9520823A1] Novel processes for improving uniformity, reliability and throughput of processes used in semiconductor manufacturing. In one process of the present invention used to reduce moisture contamination, a substrate is placed in a chamber (202). The chamber is then evacuated (204). Next, the chamber is refilled with dry, heated gas to desorb any moisture attached to the surface of the substrate (206). The chamber is then evacuated to remove the heated gas and any moisture desorbed from the surface of the substrate (208). The process can be repeated to ensure complete removal of all moisture present in the chamber and on the substrate (210). In another process, used to precisely control gas temperature, gases used in semiconductor process are heated to reaction temperature prior to injection into a reaction vessel.
IPC 1-7
IPC 8 full level
C23C 14/24 (2006.01); C23C 16/02 (2006.01); C23C 16/44 (2006.01); C23C 16/54 (2006.01); C23F 4/00 (2006.01); H01L 21/205 (2006.01); H01L 21/302 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR)
C23C 16/0209 (2013.01 - EP); C23C 16/4401 (2013.01 - EP); C23C 16/4408 (2013.01 - EP); C23C 16/54 (2013.01 - EP); H01L 21/02046 (2013.01 - EP); H01L 21/324 (2013.01 - KR)
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 9520823 A1 19950803; AU 1559195 A 19950815; EP 0741909 A1 19961113; EP 0741909 A4 19980107; JP H09508494 A 19970826; KR 970700935 A 19970212; SG 165131 A1 20101028
DOCDB simple family (application)
US 9500131 W 19950112; AU 1559195 A 19950112; EP 95907316 A 19950112; JP 52005195 A 19950112; KR 19960704068 A 19960727; SG 1996005426 A 19950112