EP 0742455 B1 20011212 - Scale, method of fabricating a scale and a position measuring device
Title (en)
Scale, method of fabricating a scale and a position measuring device
Title (de)
Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung
Title (fr)
Echelle et méthode de fabrication d'une échelle ainsi qu'un dispositif de mesure de position
Publication
Application
Priority
EP 95105584 A 19950413
Abstract (en)
[origin: EP0742455A1] Phase lattice comprises two spaced reflection layers (2,4)arranged on both sides of a transparent spacer layer (3). The reflection layer (2) is formed as a permanent layer and the reflection layer (4) formed as an amplitude lattice. The novelty is that the spacer layer (3) is provided between parallel facing regions of both reflection layers (2,4) and forms bars which form edges diagonal to the reflection layers (2,4). The refractive index is different on both sides of the edge. Prodn. of the phase lattice is also claimed.
IPC 1-7
IPC 8 full level
G01B 11/00 (2006.01); G02B 5/18 (2006.01); G03F 9/00 (2006.01)
CPC (source: EP US)
G02B 5/1857 (2013.01 - EP US); G02B 5/1861 (2013.01 - EP US); G03F 9/70 (2013.01 - EP US); Y10S 359/90 (2013.01 - EP)
Designated contracting state (EPC)
AT CH DE FR GB IT LI
DOCDB simple family (publication)
US 5786931 A 19980728; AT E210832 T1 20011215; DE 19608978 A1 19961017; DE 59509940 D1 20020124; EP 0742455 A1 19961113; EP 0742455 B1 20011212; JP 2891332 B2 19990517; JP H08286020 A 19961101
DOCDB simple family (application)
US 62937996 A 19960408; AT 95105584 T 19950413; DE 19608978 A 19960308; DE 59509940 T 19950413; EP 95105584 A 19950413; JP 8405496 A 19960405