EP 0744821 A2 19961127 - Electrostatic actuator with different electrode spacing
Title (en)
Electrostatic actuator with different electrode spacing
Title (de)
Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand
Title (fr)
Actionneur électrostatique avec écartement différent des électrodes
Publication
Application
Priority
JP 12791295 A 19950526
Abstract (en)
In an electro static actuator, a stator element (22) having electrodes (30a, 30b) formed on an insulation layer (29) and a movable element (21) having electrodes (27a, 27b) formed on an insulation layer (26). The movable element is arranged opposite to the stator element so as to be movable with respect to the stator element. The electrodes of the movable element and the stator element are connected together at every other electrode to provide two phases (a, b ; U, V) for the movable element and the stator element, respectively. An interval (L3, L4) of the electrodes of the stator element is made unequal. The electrodes of the movable element are applied with a voltage of fixed polarity, while the electrodes of the stator element are applied with a voltage of switched-over polarity. A ground section (40) is provided between adjacent ones of the electrodes of one of the movable element and the stator element and is continuously grounded. <IMAGE>
IPC 1-7
IPC 8 full level
H02N 1/00 (2006.01)
CPC (source: EP US)
H02N 1/004 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0744821 A2 19961127; EP 0744821 A3 19961204; EP 0744821 B1 19990901; DE 69604015 D1 19991007; DE 69604015 T2 20000525; US 5869916 A 19990209
DOCDB simple family (application)
EP 96303714 A 19960524; DE 69604015 T 19960524; US 65371796 A 19960523