EP 0748512 A1 19961218 - METHOD OF MANUFACTURING A THIN, RADIOTRANSPARENT WINDOW
Title (en)
METHOD OF MANUFACTURING A THIN, RADIOTRANSPARENT WINDOW
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES RÖNTGENSTRAHLDURCHLÄSSIGEN FENSTERS
Title (fr)
PROCEDE DE FABRICATION D'UNE FENETRE DE FAIBLE EPAISSEUR, TRANSPARENTE AUX RAYONS X
Publication
Application
Priority
- EP 95936712 A 19951127
- EP 95200003 A 19950104
- IB 9501061 W 19951127
Abstract (en)
[origin: WO9621235A1] A method of manufacturing a radiotransparent window. In order to achieve suitable radiation transmission, notably for long-wave X-rays, the window is made of a material containing exclusively light elements such as carbon and hydrogen. This material is deposited on a metal or semiconductor substrate, for example of silicon, after which the window material is exposed to such a dose of ion bombardment that the material is converted into glassy carbon. This carbon modification can be realised in very thin layers and is chemically very resistant, so that it can serve very well as an etching stop for etching off (a part of) the substrate material.
IPC 1-7
IPC 8 full level
G21K 5/04 (2006.01); G01T 7/00 (2006.01); H01J 5/18 (2006.01); H01J 35/18 (2006.01); H01J 47/00 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP)
H01J 5/18 (2013.01); H01J 47/004 (2013.01)
Citation (search report)
See references of WO 9621235A1
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
WO 9621235 A1 19960711; EP 0748512 A1 19961218; JP H11505602 A 19990521
DOCDB simple family (application)
IB 9501061 W 19951127; EP 95936712 A 19951127; JP 52082096 A 19951127