EP 0751297 B1 20020918 - Turbo molecular pump
Title (en)
Turbo molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculaire
Publication
Application
Priority
FR 9507922 A 19950630
Abstract (en)
[origin: EP0751297A1] The turbomolecular pump comprises a rotor (1) and a stator (2) with rotor stage fins (1A - 1G) alternated with stator fins (2A- 2F). The rotor is in the shape of a bell and the stator has an external part (2') which carries its fins and an internal part (2") penetrating into the rotor. The internal part encloses the pump delivery and comprises an external peripheral rim forming a flange (4). The stator external part carrying the stator fins is formed from two half stators (2'A,2'B) joined in a diametral plane. Each half stator is a monobloc and is positioned axially and hooked onto a span (12), located at the end opposite suction, in a circular groove (11) complementary to the stator internal part. The external diameter of the rotor first fin stage (1A), on the suction side, corresponds, with a small operating play, to the external diameter of the stator external part.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE GB IT LI
DOCDB simple family (publication)
EP 0751297 A1 19970102; EP 0751297 B1 20020918; DE 69623700 D1 20021024; DE 69623700 T2 20030731; FR 2736103 A1 19970103; FR 2736103 B1 19970808; JP 3766138 B2 20060412; JP H0914185 A 19970114; US 5722819 A 19980303
DOCDB simple family (application)
EP 96401388 A 19960624; DE 69623700 T 19960624; FR 9507922 A 19950630; JP 16961196 A 19960628; US 67155596 A 19960627