Global Patent Index - EP 0757598 A4

EP 0757598 A4 2001-03-14 - PULSED ION BEAM ASSISTED DEPOSITION

Title (en)

PULSED ION BEAM ASSISTED DEPOSITION

Title (de)

MIT GEPULSTEM IONENSTRAHL UNTERSTÜTZTE BESCHICHTUNG

Title (fr)

DEPOT ASSISTE PAR FAISCEAU D'IONS PULSE

Publication

EP 0757598 A4 (EN)

Application

EP 96906197 A

Priority

  • US 9601000 W
  • US 37670295 A

Abstract (en)

[origin: WO9622841A1] The present invention is for a high-speed, commercial-scale means for deposition of films and coatings on a substrate. The PIBAD (pulsed ion beam assisted deposition) processes [Fig. 4] allow notonly deposition, but also special modes of post-deposition treatment of films and coatings, including annealing, melting and regrowth [Fig. 4A], shock wave treatment, and high-pressure plasma redeposition [Fig. 4B] all of which can alter the mechanical, cohesive, and corrosive properties of the final product. In one embodiment of the invention the power system comprises a motor (5) which drives an alternator (10). The alternator delivers a signal to a pulse compression system (15) which has two subsystems, a 1 mu s pulse compressor (12), and a pulse forming line (14). The pulse compression system (15) provides pulses to a linear inductive voltage adder (LIVA)(20) which delivers the pulses to the ion beam source (25).

IPC 1-7 (main, further and additional classification)

B05C 11/00; B05B 1/32; B05B 3/02; B05B 3/06; B05D 3/14; C08F 2/46; C23C 8/00; C23C 14/00; C23C 16/00; H05H 1/00; H05H 1/24

IPC 8 full level (invention and additional information)

B23K 15/00 (2006.01); C23C 14/22 (2006.01); C23C 14/58 (2006.01); C23C 26/02 (2006.01); H01J 27/14 (2006.01); H01J 37/317 (2006.01); H01L 21/203 (2006.01)

CPC (invention and additional information)

C23C 14/5833 (2013.01); C23C 14/221 (2013.01); C23C 26/02 (2013.01); H01J 27/14 (2013.01); H01J 37/3178 (2013.01); H01J 2237/3142 (2013.01)

Citation (search report)

Designated contracting state (EPC)

BE CH DE DK FR GB IT LI NL

EPO simple patent family

WO 9622841 A1 19960801; AU 4965896 A 19960814; CA 2186102 A1 19960801; EP 0757598 A1 19970212; EP 0757598 A4 20010314; IL 116876 D0 19960723; JP H09511028 A 19971104

INPADOC legal status


2003-02-05 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020801

2001-03-14 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20010126

2001-03-14 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A4

- Designated State(s): BE CH DE DK FR GB IT LI NL

2001-03-14 [RIC1] CLASSIFICATION (CORRECTION)

- Free text: 7B 05C 11/00 A, 7B 05B 1/32 B, 7B 05B 3/02 B, 7B 05B 3/06 B, 7C 08F 2/46 B, 7C 23C 8/00 B, 7C 23C 14/00 B, 7C 23C 16/00 B, 7H 05H 1/00 B, 7H 05H 1/24 B, 7B 05D 3/14 B

1997-03-26 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 19970124

1997-02-12 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE CH DE DK FR GB IT LI NL