EP 0758310 A1 19970219 - NOVEL SILICON CARBIDE DUMMY WAFER
Title (en)
NOVEL SILICON CARBIDE DUMMY WAFER
Title (de)
NEUER SILICIUMCARBID ERSATZWAFER
Title (fr)
NOUVELLE TRANCHE VIERGE AU CARBURE DE SILICIUM
Publication
Application
Priority
- US 9602880 W 19960228
- US 39697095 A 19950301
Abstract (en)
[origin: WO9626910A1] The present invention relates to an unsiliconized or siliconized wafer consisting essentially of recrystallized silicon carbide, the wafer having a diameter of at least 150 mm and a thickness of between 0.5 and 2 mm, and having a porosity or free silicon content between 15 v/o and 43 v/o.
IPC 1-7
IPC 8 full level
C04B 35/565 (2006.01); C04B 35/573 (2006.01); C04B 38/00 (2006.01); C04B 41/87 (2006.01); C30B 25/02 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR)
C04B 35/573 (2013.01 - EP KR); C04B 35/575 (2013.01 - EP); C04B 35/62655 (2013.01 - EP); C04B 35/632 (2013.01 - EP); C04B 35/63424 (2013.01 - EP); C04B 38/00 (2013.01 - EP); C04B 41/009 (2013.01 - EP); C04B 41/5059 (2013.01 - EP); C04B 41/87 (2013.01 - EP); C30B 25/02 (2013.01 - EP); C30B 29/06 (2013.01 - EP); C04B 2235/3826 (2013.01 - EP); C04B 2235/428 (2013.01 - EP); C04B 2235/5472 (2013.01 - EP); C04B 2235/6027 (2013.01 - EP); C04B 2235/608 (2013.01 - EP); C04B 2235/61 (2013.01 - EP); C04B 2235/616 (2013.01 - EP); C04B 2235/661 (2013.01 - EP); C04B 2235/77 (2013.01 - EP); C04B 2235/95 (2013.01 - EP)
C-Set (source: EP)
- C04B 38/00 + C04B 20/0076 + C04B 35/565 + C04B 38/0051 + C04B 38/0074 + C04B 41/4531 + C04B 41/5059
- C04B 38/00 + C04B 20/0076 + C04B 35/565 + C04B 38/0051 + C04B 38/0074 + C04B 41/5035
- C04B 38/00 + C04B 20/0076 + C04B 35/565 + C04B 38/0051 + C04B 38/0074 + C04B 41/5096
- C04B 41/5059 + C04B 41/4531
- C04B 41/009 + C04B 35/565
- C04B 41/009 + C04B 35/573
- C04B 41/009 + C04B 38/00
Citation (search report)
See references of WO 9626910A1
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9626910 A1 19960906; AU 5180496 A 19960918; BR 9605818 A 19970916; CA 2188290 A1 19960906; CN 1147806 A 19970416; CZ 321196 A3 19970416; EP 0758310 A1 19970219; JP 2000513689 A 20001017; KR 970702830 A 19970610; MX 9605290 A 19971031
DOCDB simple family (application)
US 9602880 W 19960228; AU 5180496 A 19960228; BR 9605818 A 19960228; CA 2188290 A 19960228; CN 96190134 A 19960228; CZ 321196 A 19960228; EP 96908623 A 19960228; JP 52644196 A 19960228; KR 19960706158 A 19961101; MX 9605290 A 19960228