Title (en)

ULTRASONIC TRANSDUCER AND METHOD FOR MAKING SAME

Title (de)

ULTRASCHALLWANDLER UND VERFAHREN ZU DESSEN HERSTELLUNG

Title (fr)

TRANSDUCTEUR ULTRASONORE ET PROCEDE DE FABRICATION D'UN TEL TRANSDUCTEUR

Publication

EP 0765590 A1 19970402 (FR)

Application

EP 95922584 A 19950608

Priority

• FR 9500753 W 19950608
• FR 9407488 A 19940617

Abstract (en)

[origin: WO9535642A1] An ultrasonic transducer (38) including a 0.1-0.5 mu m-thick silicon nitride membrane (4a) with an intrinsic mechanical stress of 100 MPa to 1.3 GPa, and a fixed electrode (15) made of a non-metallic rigid material and provided with a plurality of holes (25) with a small average diameter, said fixed electrode defining with said membrane an inner space 1-5 mu m thick. A method for making said ultrasonic transducer is also disclosed.

IPC 1-7

H04R 19/00; G01H 11/06; B06B 1/02; B06B 1/06

IPC 8 full level

B06B 1/02 (2006.01); G01H 11/06 (2006.01)

CPC (source: EP)

B06B 1/0292 (2013.01); G01H 11/06 (2013.01)

Citation (search report)

See references of WO 9535642A1

Designated contracting state (EPC)

AT BE CH DE DK ES FR GB IT LI NL SE

DOCDB simple family (publication)

WO 9535642 A1 19951228; AU 2742795 A 19960115; EP 0765590 A1 19970402; FR 2721471 A1 19951222; FR 2721471 B1 19960802

DOCDB simple family (application)

FR 9500753 W 19950608; AU 2742795 A 19950608; EP 95922584 A 19950608; FR 9407488 A 19940617