EP 0769350 A1 19970423 - Method and apparatus for dressing polishing cloth
Title (en)
Method and apparatus for dressing polishing cloth
Title (de)
Verfahren und Vorrichtung zum Abrichten von Poliertuch
Title (fr)
Procédé et dispositif pour dresser un tissu de polissage
Publication
Application
Priority
- JP 29610795 A 19951019
- JP 29610895 A 19951019
Abstract (en)
A polishing cloth mounted on a turntable is dressed by a dresser for restoring polishing capability of the polishing cloth. The dresser comprises a dresser body and an annular diamond grain layer provided on the dresser body, and the annular diamond grain layer is made of diamond grains which are electrodeposited. Alternatively, the dresser comprises a dresser body and a SiC layer provided on the dresser body. The dressing of the polishing cloth is performed by bringing the diamond grain layer or the SiC layer into contact with the polishing cloth while the turntable and the dresser are rotating. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 37/04 (2012.01)
CPC (source: EP KR)
B24B 37/042 (2013.01 - EP); B24B 53/017 (2013.01 - EP); H01L 21/304 (2013.01 - KR)
Citation (search report)
- [A] GB 2287422 A 19950920 - NEC CORP [JP]
- [PA] US 5486131 A 19960123 - CESNA JOSEPH V [US], et al
- [PA] US 5531635 A 19960702 - MOGI KATSUMI [JP], et al
- [A] PATENT ABSTRACTS OF JAPAN vol. 012, no. 292 (M - 729) 10 August 1988 (1988-08-10)
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 96116818 A 19961018; KR 19960046816 A 19961018