Global Patent Index - EP 0770700 A1

EP 0770700 A1 19970502 - Process for formation of oxide thin film

Title (en)

Process for formation of oxide thin film

Title (de)

Verfahren zum Herstellen einer dünnen Oxidschicht

Title (fr)

Procédé de fabrication d'une couche mince d'oxyde

Publication

EP 0770700 A1 19970502 (EN)

Application

EP 96117151 A 19961025

Priority

JP 30045595 A 19951026

Abstract (en)

A process for formation of oxide thin film, which comprises applying a laser beam on a target oxide material to generate a vapor therefrom and depositing the vapor on a substrate to form an oxide thin film on the substrate, wherein the formation of an oxide thin film on the substrate is conducted by disposing the target and the substrate face to face, scanning the laser beam applied onto the target, in a direction normal to the target central axis, and rotating the substrate.

IPC 1-7

C23C 14/28; C23C 14/08; H01L 39/24

IPC 8 full level

C30B 23/06 (2006.01); C23C 14/08 (2006.01); C23C 14/28 (2006.01); C30B 23/08 (2006.01); C30B 29/22 (2006.01); H10N 60/01 (2023.01)

CPC (source: EP)

C23C 14/28 (2013.01); H10N 60/0521 (2023.02)

Citation (search report)

  • [X] GREER J A: "HIGH QUALITY YBCO FILMS GROWN OVER LARGE AREAS BY PULSED LASER DEPOSITION", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, vol. 10, no. 4 PT II, 1 July 1992 (1992-07-01), pages 1821 - 1826, XP000296255
  • [X] GREER J A ET AL: "LARGE-AREA PULSED LASER DEPOSITION: TECHNIQUES AND APLLICATIONS", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, vol. 13, no. 3, PART 01, 1 May 1995 (1995-05-01), pages 1175 - 1181, XP000531614
  • [X] GREER J A ET AL.: "LASER-ABLATION OF VARIOUS OXIDE MATERIALS OVER LARGE AREAS", MATERIALS RESEARCH SOC. SYMP. PROC., vol. 191, 19 April 1990 (1990-04-19) - 20 April 1990 (1990-04-20), SAN FRANSISCO/US, pages 171 - 176, XP000406190
  • [A] LEE S -G ET AL: "DEPOSITION ANGLE-DEPENDENT MORPHOLOGY OF LASER DEPOSITED YBA2CU3O7 THIN FILMS", APPLIED PHYSICS LETTERS, vol. 65, no. 6, 8 August 1994 (1994-08-08), pages 764 - 766, XP000464593

Designated contracting state (EPC)

DE FR GB

DOCDB simple family (publication)

EP 0770700 A1 19970502; CA 2188902 A1 19970427; JP H09118589 A 19970506

DOCDB simple family (application)

EP 96117151 A 19961025; CA 2188902 A 19961025; JP 30045595 A 19951026