EP 0776383 A4 20000223 - ELECTROCHROMIC MATERIALS AND DEVICES, AND METHOD
Title (en)
ELECTROCHROMIC MATERIALS AND DEVICES, AND METHOD
Title (de)
ELEKTROCHROMES MATERIAL, VORRICHTUNG UND VERFAHREN
Title (fr)
SUBSTANCES ET DISPOSITIFS ELECTROCHROMIQUES, ET PROCEDES CORRESPONDANTS
Publication
Application
Priority
- US 9510597 W 19950817
- US 29312994 A 19940819
Abstract (en)
[origin: WO9606203A1] A process for manufacturing electrochromic layers/devices at high rates and low deposition temperatures is described. The method utilizes the magnetron enhanced sputtering technique in which a substrate (36) is rotated past sputter cathodes (38, 40, 42, 44, 46) and past a reactive ion source (48) in order to deposit a layered electrochromic device. The process uses high system pressure and large reaction gas flow rates, but relatively low reactive gas partial pressures at the sputter cathodes (38, 40, 42, 44, 46) to reproducibly form electrochromic materials and devices which exhibit excellent optical and physical properties.
IPC 1-7
IPC 8 full level
C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); G02F 1/15 (2006.01); G02F 1/1524 (2019.01)
CPC (source: EP US)
C23C 14/0078 (2013.01 - EP); C23C 14/083 (2013.01 - EP); C23C 14/085 (2013.01 - EP US); G02F 1/1524 (2018.12 - EP US)
Citation (search report)
- No further relevant documents disclosed
- See references of WO 9606203A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9606203 A1 19960229; EP 0776383 A1 19970604; EP 0776383 A4 20000223; JP H10501847 A 19980217
DOCDB simple family (application)
US 9510597 W 19950817; EP 95930870 A 19950817; JP 50824195 A 19950817