EP 0777694 A1 19970611 - METAL ION REDUCTION IN NOVOLAK RESIN SOLUTION USING AN ANION EXCHANGE RESIN
Title (en)
METAL ION REDUCTION IN NOVOLAK RESIN SOLUTION USING AN ANION EXCHANGE RESIN
Title (de)
METALLIONENGEHALT REDUZIERUNG VON NOVOLAKHARZLÖSUNGEN MIT EINEM ANIONENAUSTAUSCHERHARZ
Title (fr)
REDUCTION D'IONS METALLIQUES DANS DES SOLUTIONS DE NOVOLAQUE AU MOYEN D'UN RESINE D'ECHANGE ANIONIQUE
Publication
Application
Priority
- US 9509855 W 19950803
- US 29445394 A 19940823
Abstract (en)
[origin: US6043002A] The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions, utilizing a specially treated anion exchange resin. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.
IPC 1-7
IPC 8 full level
C08G 8/00 (2006.01); C08G 8/08 (2006.01); C08G 8/10 (2006.01); C08G 8/28 (2006.01); G03F 7/004 (2006.01); G03F 7/023 (2006.01)
CPC (source: EP US)
C08G 8/00 (2013.01 - EP US); C08G 8/10 (2013.01 - EP US); C08G 8/28 (2013.01 - EP US); G03F 7/004 (2013.01 - EP US); G03F 7/0236 (2013.01 - EP US)
Citation (search report)
See references of WO 9606121A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
US 6043002 A 20000328; CN 1074425 C 20011107; CN 1155889 A 19970730; DE 69505265 D1 19981112; DE 69505265 T2 19990512; EP 0777694 A1 19970611; EP 0777694 B1 19981007; JP 3924317 B2 20070606; JP H10504599 A 19980506; KR 100361878 B1 20030214; US 5686561 A 19971111; WO 9606121 A1 19960229
DOCDB simple family (application)
US 90244297 A 19970729; CN 95194671 A 19950803; DE 69505265 T 19950803; EP 95929377 A 19950803; JP 50809496 A 19950803; KR 19970700739 A 19970204; US 29445394 A 19940823; US 9509855 W 19950803