EP 0777850 A4 19990203 - INTEGRAL FIELD LENS ILLUMINATION FOR VIDEO INSPECTION
Title (en)
INTEGRAL FIELD LENS ILLUMINATION FOR VIDEO INSPECTION
Title (de)
INTEGRALE BELEUCHTUNG MIT FELDLINSE FÜR VIDEOINSPEKTION
Title (fr)
ECLAIREMENT INTEGRAL PAR LENTILLE DE CHAMP POUR CONTROLE VIDEO
Publication
Application
Priority
- US 9506435 W 19950522
- US 29668894 A 19940826
Abstract (en)
[origin: WO9607076A1] A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).
IPC 1-7
IPC 8 full level
G01B 11/30 (2006.01); G01N 21/84 (2006.01); G01N 21/88 (2006.01); G01N 21/90 (2006.01)
CPC (source: EP)
G01N 21/8806 (2013.01); G01N 21/90 (2013.01)
Citation (search report)
- [XY] WO 9316373 A1 19930819 - TENCOR INSTRUMENTS [US]
- [Y] US 5163102 A 19921110 - YAMAZAKI MASAO [JP], et al
- [YA] PATENT ABSTRACTS OF JAPAN vol. 018, no. 333 (P - 1759) 23 June 1994 (1994-06-23)
- See references of WO 9607076A1
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9607076 A1 19960307; AU 2644095 A 19960322; EP 0777850 A1 19970611; EP 0777850 A4 19990203; JP H10505155 A 19980519
DOCDB simple family (application)
US 9506435 W 19950522; AU 2644095 A 19950522; EP 95921336 A 19950522; JP 50871896 A 19950522