EP 0782542 A1 19970709 - METHOD OF NITRIDING SILICON
Title (en)
METHOD OF NITRIDING SILICON
Title (de)
VERFAHREN ZUR NITRIDIERUNG VON SILIZIUM
Title (fr)
PROCEDE DE NITRURATION DU SILICIUM
Publication
Application
Priority
- US 9508418 W 19950705
- US 27061394 A 19940705
Abstract (en)
[origin: WO9601229A1] A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by (a) heating the silicon-containing material in an atmosphere containing at least hydrogen in the temperature range of about 0 DEG C to about 800 DEG C and (b) thereafter, nitriding the silicon-containing material by subjecting the silicon-containing material to a nitriding atmosphere containing at least nitrogen gas in the temperature range of from about 1000 DEG C to about 1450 DEG C to effect nitriding.
IPC 1-7
IPC 8 full level
C01B 21/068 (2006.01); C04B 35/591 (2006.01)
CPC (source: EP)
C01B 21/0682 (2013.01); C04B 35/591 (2013.01)
Citation (search report)
See references of WO 9601229A1
Designated contracting state (EPC)
DE ES FR GB IT
DOCDB simple family (publication)
DOCDB simple family (application)
US 9508418 W 19950705; EP 95925485 A 19950705