EP 0787562 A1 19970806 - Double side polishing machine and method of polishing opposite sides of a workpiece using the same
Title (en)
Double side polishing machine and method of polishing opposite sides of a workpiece using the same
Title (de)
Doppelseitenpoliermaschine und Verfahren zum Polieren von gegenüberliegenden Seiten eines Werkstückes mittels derselben
Title (fr)
Machine de polissage double-face et procédé de polissage des faces opposées d'une pièce au moyen de cette dernière
Publication
Application
Priority
- JP 3868196 A 19960201
- JP 9616696 A 19960326
Abstract (en)
A double side polishing machine includes a disk-shaped carrier for holding an article to be polished, and a sun gear and an internal gear which are meshed with external teeth of the carrier. The tooth portions of the sun gear and the internal gear are made of a hard resin material, such as polyimide sintered body or polyamide imide resin, which has excellent wear resistance, sufficient self-lubricating performance, and high shear resistance. Each tooth portion is formed as a single member, or is formed by a plurality of separable segments. Alternatively, the internal and sun gears are made of a metal such as steel and coated with a hard resin coating material. In another double side polishing machine, each of the tooth portions of the internal and sun gears is formed by a plurality of pins disposed at a predetermined pitches and sleeves fit onto the pins. The sleeves are made of a resin. Alternatively, resin-coated metallic sleeves may be used as the sleeves. The double side polishing machines can prevent generation of metal powder, thereby suppressing generation of scratches and metal contamination. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 37/08 (2012.01); B24B 37/28 (2012.01)
CPC (source: EP)
B24B 37/08 (2013.01); B24B 37/28 (2013.01)
Citation (applicant)
Citation (search report)
- [A] US 5085009 A 19920204 - KINUMURA AKIRA [JP], et al
- [A] US 4739589 A 19880426 - BREHM GERHARD [DE], et al
- [A] PATENT ABSTRACTS OF JAPAN vol. 013, no. 013 (M - 783) 12 January 1989 (1989-01-12)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0787562 A1 19970806; EP 0787562 B1 19991208; DE 69700885 D1 20000113; DE 69700885 T2 20000531; MY 129961 A 20070531
DOCDB simple family (application)
EP 97300659 A 19970131; DE 69700885 T 19970131; MY PI9700328 A 19970129