EP 0788005 B1 20061011 - Micromechanical optical modulator and method for making the same
Title (en)
Micromechanical optical modulator and method for making the same
Title (de)
Mikromechanischer optischer Modulator und Verfahren zu seiner Herstellung
Title (fr)
Modulateur micromécanique optique et son procédé de fabrication
Publication
Application
Priority
US 56545396 A 19960201
Abstract (en)
[origin: US5808781A] An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.
IPC 8 full level
G02B 26/02 (2006.01); G02B 26/00 (2006.01); H03C 7/02 (2006.01)
CPC (source: EP US)
G02B 26/001 (2013.01 - EP US); G02B 26/02 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
US 5808781 A 19980915; DE 69736792 D1 20061123; DE 69736792 T2 20070809; EP 0788005 A2 19970806; EP 0788005 A3 19980128; EP 0788005 B1 20061011; JP 3784484 B2 20060614; JP H09236760 A 19970909; US 5751469 A 19980512
DOCDB simple family (application)
US 80525597 A 19970224; DE 69736792 T 19970121; EP 97300374 A 19970121; JP 1820897 A 19970131; US 56545396 A 19960201