EP 0789382 A1 19970813 - Structure and method for fabricating of a field emission device
Title (en)
Structure and method for fabricating of a field emission device
Title (de)
Aufbau und Verfahren zur Herstellung einer Feldemissionsanordnung
Title (fr)
Structure et procédé de fabrication d'un dispositif d'émission de champ
Publication
Application
Priority
EP 96101877 A 19960209
Abstract (en)
The invention generally relates to the technical field of devices using the effect to emit electrons out of a solid into vacuum due to high electric field strength. Such devices are usually called field emission devices. The invention relates more specifically to the structure of a field emission device and to methods of fabricating a field emission device. The inventive structure of a field emission device comprises a tip 1 for emitting electrons, said tip 1 has a body 2 of a first material, said body forms a series resistor, said tip is centered in relation to a gate aperture 3 which in particular is a circular gate aperture formed by an electrode 4, wherein said tip 1 projects above the surface of said electrode 4 forming the gate aperture 3. The inventive method for fabricating a field emission device allows the critical dimensions of the tips and the gate electrode to be independently controllable and thus offers a large process window and an easy manufacturability. The range of threshold voltages at which devices emit which have been processed according to the inventive methods is very small and thus offers high multiplexibility. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 9/02 (2006.01); H01J 1/30 (2006.01); H01J 1/304 (2006.01); H01J 3/02 (2006.01)
CPC (source: EP)
H01J 1/3042 (2013.01); H01J 3/022 (2013.01)
Citation (search report)
- [Y] FR 2650119 A1 19910125 - THOMSON TUBES ELECTRONIQUES [FR]
- [X] FR 2700222 A1 19940708 - SAMSUNG DISPLAY DEVICES CO LTD [KR]
- [E] WO 9604674 A2 19960215 - CENTRAL RESEARCH LAB LTD [GB], et al
- [A] US 5451830 A 19950919 - HUANG JAMMY C [TW]
- [A] US 5394006 A 19950228 - LIU DAVID N-C [TW]
- [Y] BUSTA H H: "VACUUM MICROELECTRONICS 1992", JOURNAL OF MICROMECHANICS & MICROENGINEERING, vol. 2, 1 January 1992 (1992-01-01), pages 43 - 74, XP000560006
- [DA] SPINDT C A ET AL: "PHYSICAL PROPERTIES OF THIN-FILM FIELD EMISSION CATHODES WITH MOLYBDENUM CONES", JOURNAL OF APPLIED PHYSICS, vol. 47, no. 12, 1 December 1976 (1976-12-01), pages 5248 - 5263, XP000560520
- [DA] GHIS A ET AL: "SEALED VACCUM DEVICES: FLUORESCENT MICROTIP DISPLAYS", IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. 38, no. 10, 1 October 1991 (1991-10-01), pages 2320 - 2322, XP000225960
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DOCDB simple family (application)
EP 96101877 A 19960209; JP 3705897 A 19970205