Global Patent Index - EP 0790634 B1

EP 0790634 B1 2000-02-02 - Electrostatic-magnetic lens arrangement

Title (en)

Electrostatic-magnetic lens arrangement

Title (de)

Elektrostatisch-magnetische Linsenanordnung

Title (fr)

Dispositif de lentille électrostatique-magnétique

Publication

EP 0790634 B1 (EN)

Application

EP 96110765 A

Priority

DE 19605855 A

Abstract (en)

[origin: EP0790634A1] The invention relates to an electrostatic-magnetic lens arrangement for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01J 37/145

IPC 8 full level (invention and additional information)

H01J 37/145 (2006.01)

CPC (invention and additional information)

H01J 37/145 (2013.01); H01J 2237/2594 (2013.01)

Designated contracting state (EPC)

DE FR GB NL

DOCDB simple family

EP 0790634 A1 19970820; EP 0790634 B1 20000202; DE 19605855 A1 19970821