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EP 0790634 B1 20000202 - Electrostatic-magnetic lens arrangement

Title (en)

Electrostatic-magnetic lens arrangement

Title (de)

Elektrostatisch-magnetische Linsenanordnung

Title (fr)

Dispositif de lentille électrostatique-magnétique

Publication

EP 0790634 B1 20000202 (EN)

Application

EP 96110765 A 19960703

Priority

DE 19605855 A 19960216

Abstract (en)

[origin: EP0790634A1] The invention relates to an electrostatic-magnetic lens arrangement for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens. <IMAGE>

IPC 1-7

H01J 37/145

IPC 8 full level

H01J 37/145 (2006.01)

CPC (source: EP)

H01J 37/145 (2013.01); H01J 2237/2594 (2013.01)

Designated contracting state (EPC)

DE FR GB NL

DOCDB simple family (publication)

EP 0790634 A1 19970820; EP 0790634 B1 20000202; DE 19605855 A1 19970821; DE 69606515 D1 20000309; DE 69606515 T2 20000615

DOCDB simple family (application)

EP 96110765 A 19960703; DE 19605855 A 19960216; DE 69606515 T 19960703