Global patent index - EP 0792386 A4

EP 0792386 A4 2000-01-05 - METHOD AND APPARATUS FOR DEPOSITING A SUBSTANCE WITH TEMPERATURE CONTROL

Title (en)

METHOD AND APPARATUS FOR DEPOSITING A SUBSTANCE WITH TEMPERATURE CONTROL

Title (de)

VERFAHREN UND VORRICHTUNG ZUR ABLAGERUNG VON SUBSTANZEN MIT TEMPERATURKONTROLLE

Title (fr)

PROCEDE ET APPAREIL PERMETTANT DE DEPOSER UNE SUBSTANCE DANS DES CONDITIONS DE TEMPERATURE REGULEE

Publication

EP 0792386 A4 (EN)

Application

EP 95901749 A

Priority

US 9412605 W

Abstract (en)

[origin: WO9613623A1] The present invention is directed to an apparatus and its method of use in which a substance such as diamond is deposited on a mandrel (110) or substrate (170), and where temperature at the deposition surface is controlled. According to one aspect of the invention, the temperature on the surface of a rotating mandrel (110) is controlled by passing coolant fluid radially through the mandrel at several angular reference positions in the mandrel, while a plasma containing, e.g., a hydrocarbon gas and hydrogen gas is directed toward the mandrel. A spacer (120) having a thermal conductance in its thickness direction that varies with its radial direction is mounted on the mandrel, and a substrate (170) is mounted on the spacer (120).

IPC 1-7 (main, further and additional classification)

C23C 16/50; H05H 1/00

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); C23C 16/26 (2006.01); C23C 16/27 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01); C23C 16/513 (2006.01)

CPC (invention and additional information)

C23C 16/4584 (2013.01); C23C 16/513 (2013.01); H01J 2237/2001 (2013.01)

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

WO 9613623 A1 19960509; EP 0792386 A1 19970903; EP 0792386 A4 20000105; JP H10508069 A 19980804

INPADOC legal status

2003-07-09 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20021030

2002-06-05 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20020419

2000-01-05 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 19991124

2000-01-05 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A4

- Designated State(s): DE FR GB

1997-09-03 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 19970523

1997-09-03 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB