EP 0792437 B1 20030514 - CAPACITIVE TRANSDUCER WITH ELECTROSTATIC ACTUATION
Title (en)
CAPACITIVE TRANSDUCER WITH ELECTROSTATIC ACTUATION
Title (de)
ELEKTROSTATISCH BETRIEBENER KAPAZITIVER WANDLER
Title (fr)
TRANSDUCTEUR CAPACITIF A COMMANDE ELECTROSTATIQUE
Publication
Application
Priority
- US 9514325 W 19951102
- US 33774194 A 19941114
Abstract (en)
[origin: WO9615423A1] High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-plate capacitor transducer system (104). The transducer may be used for both applying and measuring the applied force during microindentation or micro hardness testing, and for imaging before and after the testing to achieve an atomic force microscope type image of a surface topography before and after indentation testing.
IPC 1-7
G01B 5/28; G01N 3/42; H01G 7/00; G01P 15/13; G01B 7/34; G01B 7/00; G01G 7/06
IPC 8 full level
G01B 7/00 (2006.01); G01B 7/16 (2006.01); G01B 7/34 (2006.01); G01B 21/30 (2006.01); G01D 5/24 (2006.01); G01D 5/241 (2006.01); G01G 7/06 (2006.01); G01L 1/14 (2006.01); G01N 3/40 (2006.01); G01N 3/42 (2006.01); G01P 15/13 (2006.01); G01Q 10/04 (2010.01); G01Q 10/06 (2010.01); G01N 3/02 (2006.01); G01N 3/06 (2006.01)
CPC (source: EP US)
B82Y 35/00 (2013.01 - US); G01B 7/22 (2013.01 - EP US); G01B 7/34 (2013.01 - EP US); G01D 5/2417 (2013.01 - EP US); G01G 7/06 (2013.01 - EP US); G01L 1/142 (2013.01 - EP US); G01L 1/144 (2013.01 - EP US); G01N 3/42 (2013.01 - EP US); G01Q 10/04 (2013.01 - EP US); G01Q 60/366 (2013.01 - EP US); G01N 2203/0051 (2013.01 - EP US); G01N 2203/0286 (2013.01 - EP US); G01N 2203/0647 (2013.01 - EP US); Y10S 977/872 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE LI
DOCDB simple family (publication)
WO 9615423 A1 19960523; AU 4102496 A 19960606; DE 69530784 D1 20030618; DE 69530784 T2 20040129; EP 0792437 A1 19970903; EP 0792437 A4 19981118; EP 0792437 B1 20030514; JP 4095669 B2 20080604; JP H10508944 A 19980902; US 5576483 A 19961119
DOCDB simple family (application)
US 9514325 W 19951102; AU 4102496 A 19951102; DE 69530784 T 19951102; EP 95939061 A 19951102; JP 51614496 A 19951102; US 33774194 A 19941114