EP 0792515 A1 19970903 - METHOD OF MAKING A CHEMICAL-MECHANICAL POLISHING SLURRY AND THE POLISHING SLURRY

Title (en)

METHOD OF MAKING A CHEMICAL-MECHANICAL POLISHING SLURRY AND THE POLISHING SLURRY

Title (de)

VERFAHREN ZUM HERSTELLEN EINER CHEMISCH-MECHANISCHEN POLIERAUFSCHLÄMMUNG UND DIE POLIERAUFSCHLÄMMUNG

Title (fr)

PROCEDE DE FABRICATION D'UNE SUSPENSION CHIMIO-MECANIQUE DESTINEE AU POLISSAGE ET LA SUSPENSION ELLE-MEME

Publication

EP 0792515 A1 19970903 (EN)

Application

EP 95938941 A 19951023

Priority

US 9513919 W 19951023
US 34232694 A 19941118

Abstract (en)

[origin: WO9616436A1] A tungsten chemical-mechanical polishing slurry formulated from small median diameter abrasive particles having a very tight diameter variation and by thoroughly premixing the abrasive with a surfactant suspension agent before combining the oxidizer.

IPC 1-7

H01L 21/3105; H01L 21/306

IPC 8 full level

C09G 1/02 (2006.01); H01L 21/321 (2006.01)

CPC (source: EP)

H01L 21/321 (2013.01); H01L 21/3212 (2013.01)

Citation (search report)

See references of WO 9616436A1

Designated contracting state (EPC)

DE ES FR GB IT NL

DOCDB simple family (publication)

WO 9616436 A1 19960530; EP 0792515 A1 19970903

DOCDB simple family (application)

US 9513919 W 19951023; EP 95938941 A 19951023