EP 0795231 A1 19970917 - ELECTROSTATIC MOTOR AND ITS FABRICATION PROCESS
Title (en)
ELECTROSTATIC MOTOR AND ITS FABRICATION PROCESS
Title (de)
ELEKTROSTATISCHER METER UND SEIN HERSTELLUNGSVERFAHREN
Title (fr)
MOTEUR ELECTROSTATIQUE ET SON PROCEDE DE REALISATION
Publication
Application
Priority
- FR 9501578 W 19951129
- FR 9414292 A 19941129
Abstract (en)
[origin: WO9617430A1] Electrostatic motor and its fabrication process, said electric motor comprising a fixed part (200, 204, 206, 208) called stator with an elastically deformable membrane (208) and a movable part (230) called rotor and arranged on the membrane (208) and moved by means of deformation waves from the elastic membrane, said electric motor being characterized in that it is provided with electrostatic means (204, 205) for deforming the membrane (208).
IPC 1-7
IPC 8 full level
H01L 21/302 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01); H02N 1/00 (2006.01)
CPC (source: EP US)
H02N 1/006 (2013.01 - EP US)
Citation (search report)
See references of WO 9617430A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9617430 A1 19960606; EP 0795231 A1 19970917; FR 2727583 A1 19960531; FR 2727583 B1 19961220; JP H10510136 A 19980929; US 5965968 A 19991012
DOCDB simple family (application)
FR 9501578 W 19951129; EP 95941162 A 19951129; FR 9414292 A 19941129; JP 51834196 A 19951129; US 83689897 A 19970701