EP 0800201 B1 20000920 - Long-life excimer radiator, processes for manufacturing and for increasing the life of such a radiator and device for implementing said last process
Title (en)
Long-life excimer radiator, processes for manufacturing and for increasing the life of such a radiator and device for implementing said last process
Title (de)
Langlebiger Excimerstrahler, Verfahren zu seiner Herstellung und zur Lebensdauerverlängerung sowie Vorrichtung zur Durchführung des letztgenannten Verfahrens
Title (fr)
Source de rayonnement à excimer à longue durée de vie, son procédé de fabrication et procédé pour l'allongement de sa durée de vie ainsi qu'un dispositif pour la mise en oeuvre de ce dernier procédé
Publication
Application
Priority
DE 19613502 A 19960404
Abstract (en)
[origin: EP0800201A2] In an excimer emitter with a halogen-containing gas-filled discharge space, the halogen content of the discharge space (16) is ≥ 1 x 10<-10>, preferably 1 x 10<-10>-1 x 10<-5>) mol/cm<3> per cm<2> of its interior surface and is also adjusted in accordance with the maximum power density (in W/cm of emitter length) of the emitter (11) to a value of 1 x 10<-7>-1 x 10<-5> mol/cm<3> per unit power density. Also claimed are: (i) the production of a long life excimer emitter as above, in which the interior surfaces of the discharge space (16) are exposed to a halogen-containing passivating gas, preferably chlorine, prior to gas filling; (ii) a process for extending the life of an excimer emitter, having a halogen-containing gas-filled discharge space, by exposing the discharge space (16) to IR radiation or by releasing halogen from a halogen reservoir (17) located in the discharge space (16); and (iii) an apparatus for carrying out the above processes (i) and (ii).
IPC 1-7
IPC 8 full level
G21K 5/00 (2006.01); H01J 61/12 (2006.01); H01J 61/70 (2006.01); H01J 65/00 (2006.01); H01J 65/04 (2006.01); H01S 3/036 (2006.01); H01S 3/225 (2006.01)
CPC (source: EP US)
H01J 61/12 (2013.01 - EP US); H01J 61/70 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE GB IT LI NL
DOCDB simple family (publication)
EP 0800201 A2 19971008; EP 0800201 A3 19980128; EP 0800201 B1 20000920; DE 19613502 A1 19971009; DE 19613502 C2 19980709; DE 59702367 D1 20001026; JP 4004590 B2 20071107; JP H1051081 A 19980220; US 5889367 A 19990330
DOCDB simple family (application)
EP 97105297 A 19970327; DE 19613502 A 19960404; DE 59702367 T 19970327; JP 8346997 A 19970402; US 83228197 A 19970403