EP 0802028 B1 20030521 - Device for emplacing slices obtained by sawing of a block in storage elements
Title (en)
Device for emplacing slices obtained by sawing of a block in storage elements
Title (de)
Vorrichtung für das Einlegen von durch Zersägen eines Rohlings erhaltenen Wafern in Aufbewahrungselemente
Title (fr)
Dispositif pour la mise en éléments de stockage de tranches obtenues par sciage d'un bloc
Publication
Application
Priority
CH 95696 A 19960416
Abstract (en)
[origin: EP0802028A2] The method involves placing the wafers (2) of a cut block (1) attached b a heel section (3) to s cutting support (4,5). A cutting station (6-8) has a cutter (7,15) to cut the heel and a drive (6) moves the wafers with respect to the cutter to present the wafers individually to a cutter to detach the wafers one by one from the heel sections. A collector (9,10) collects each detached wafer and places it in an empty case of the cassette. There can be a support plate (4) on which the cut block is placed and which is mounted on the cutter base.
IPC 1-7
IPC 8 full level
B28D 1/04 (2006.01); B28D 5/00 (2006.01); H01L 21/304 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP)
B28D 5/0082 (2013.01)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 0802028 A2 19971022; EP 0802028 A3 19980408; EP 0802028 B1 20030521; CH 691169 A5 20010515; DE 69722071 D1 20030626; DE 69722071 T2 20040318; JP H1070095 A 19980310
DOCDB simple family (application)
EP 97105331 A 19970329; CH 95696 A 19960416; DE 69722071 T 19970329; JP 11357397 A 19970416