EP 0807600 B1 20000112 - Ultra-high purity nitrogen trifluoride production method, and unit therefor
Title (en)
Ultra-high purity nitrogen trifluoride production method, and unit therefor
Title (de)
Verfahren und Vorrichtung zur Herstellung von hochreinem Stickstofftrifluorid
Title (fr)
Procédé et dispositif pour la production de trifluorure d'azote ultra-pure
Publication
Application
Priority
JP 11889896 A 19960514
Abstract (en)
[origin: EP0807600A1] A method capable of continuously producing nitrogen trifluoride of ultra-high purity and a unit therefor are provided. An ultra-high purity nitrogen trifluoride production method comprises: pressurizing a nitrogen trifluoride feed gas, eliminating moisture and carbon dioxide from said feed gas, and cooling down the same feed gas; causing the cooled feed gas to pass through adsorption columns (T1, T2), and introducing it into a medium-pressure rectification column (K1) by way of a reboiler (E2) in said medium-pressure rectification column, where it is rectified in said medium-pressure rectification column; introducing the resulting gas obtained by this rectification into a middle stage of a low-pressure rectification column (K2), where it is rectified; and taking out ultra-high purity nitrogen trifluoride obtained by virtue of this rectification from the lower part of said low-pressure rectification column. <IMAGE>
IPC 1-7
IPC 8 full level
C01B 21/083 (2006.01); F25J 3/02 (2006.01); F25J 3/08 (2006.01)
CPC (source: EP US)
C01B 21/0832 (2013.01 - EP US); Y10S 62/918 (2013.01 - EP US); Y10S 62/928 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0807600 A1 19971119; EP 0807600 B1 20000112; DE 69701106 D1 20000217; DE 69701106 T2 20000824; JP 3532345 B2 20040531; JP H09303955 A 19971128; US 5832746 A 19981110
DOCDB simple family (application)
EP 97401058 A 19970513; DE 69701106 T 19970513; JP 11889896 A 19960514; US 85600597 A 19970514