Global Patent Index - EP 0807600 B1

EP 0807600 B1 2000-01-12 - Ultra-high purity nitrogen trifluoride production method, and unit therefor

Title (en)

Ultra-high purity nitrogen trifluoride production method, and unit therefor

Title (de)

Verfahren und Vorrichtung zur Herstellung von hochreinem Stickstofftrifluorid

Title (fr)

Procédé et dispositif pour la production de trifluorure d'azote ultra-pure

Publication

EP 0807600 B1 (EN)

Application

EP 97401058 A

Priority

JP 11889896 A

Abstract (en)

[origin: EP0807600A1] A method capable of continuously producing nitrogen trifluoride of ultra-high purity and a unit therefor are provided. An ultra-high purity nitrogen trifluoride production method comprises: pressurizing a nitrogen trifluoride feed gas, eliminating moisture and carbon dioxide from said feed gas, and cooling down the same feed gas; causing the cooled feed gas to pass through adsorption columns (T1, T2), and introducing it into a medium-pressure rectification column (K1) by way of a reboiler (E2) in said medium-pressure rectification column, where it is rectified in said medium-pressure rectification column; introducing the resulting gas obtained by this rectification into a middle stage of a low-pressure rectification column (K2), where it is rectified; and taking out ultra-high purity nitrogen trifluoride obtained by virtue of this rectification from the lower part of said low-pressure rectification column. <IMAGE>

IPC 1-7

C01B 21/083; F25J 3/02

IPC 8 full level

C01B 21/083 (2006.01); F25J 3/02 (2006.01); F25J 3/08 (2006.01)

CPC

C01B 21/0832 (2013.01); Y10S 62/918 (2013.01); Y10S 62/928 (2013.01)

DCS

DE FR GB IT NL

DOCDB simple family

EP 0807600 A1 19971119; EP 0807600 B1 20000112; DE 69701106 D1 20000217; DE 69701106 T2 20000824; JP 3532345 B2 20040531; JP H09303955 A 19971128; US 5832746 A 19981110