EP 0813230 A3 20010530 - Device for dry cleaning dust soiled objects for carrying and keeping semi-conductor wafers
Title (en)
Device for dry cleaning dust soiled objects for carrying and keeping semi-conductor wafers
Title (de)
Vorrichtung zum Trockenreinigen von staubverschmutzten Hilfsgegenständen zur Handhabung und Aufbewahrung von Halbleiterwafern
Title (fr)
Dispositif pour nettoyage par voie sèche d'objets souillés de poussière pour maintenance et stockage de plaquettes semi-conductrices
Publication
Application
Priority
DE 19623766 A 19960614
Abstract (en)
[origin: EP0813230A2] An apparatus for dry cleaning a dust-laden wafer handling and holding article, especially a quartz carrier (1), consists of a housing (2) having a reception opening (3) closed by a cover (4), a reception area (5) for the article and a spatially separate collection area (6), one or more gas inlet nozzles (8) being provided in the reception area (5) and a gas suction opening (19) being provided in the collection area (6) so that the article can be swept by a cleaning gas. Several gas inlet nozzles (8) are provided in the housing cover (4) which contains channels (9) for supplying cleaning gas to the nozzles.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP US)
H01L 21/67028 (2013.01 - EP US)
Citation (search report)
- [X] US 4571850 A 19860225 - HUNT JAMES R [US], et al
- [X] EP 0702397 A2 19960320 - SEMITOOL INC [US]
- [A] US 5379784 A 19950110 - NISHI MITUO [JP], et al
- [A] US 5238503 A 19930824 - PHENIX ROBERT B [US], et al
- [A] US 4017330 A 19770412 - AIDLIN SAMUEL S, et al
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0813230 A2 19971217; EP 0813230 A3 20010530; EP 0813230 B1 20060726; DE 19623766 A1 19971218; DE 59712698 D1 20060907; US 5991965 A 19991130
DOCDB simple family (application)
EP 97109257 A 19970607; DE 19623766 A 19960614; DE 59712698 T 19970607; US 87449997 A 19970613