EP 0816892 A3 19990609 - Catadioptric lens system
Title (en)
Catadioptric lens system
Title (de)
Katadioptrisches Linsensystem
Title (fr)
Système de lentilles catadioptrique
Publication
Application
Priority
JP 15377096 A 19960614
Abstract (en)
[origin: EP0816892A2] A catadioptric lens system whose entire size is practically compact and is capable of providing a large numerical aperture in the ultraviolet band region is disclosed. The invention also provides photolithographic resolution of quarter micron levels and is easy to manufacture. The invention comprises, a first lens system S1 constructed with refractive members, a concave mirror M1, and a second lens system S2 constructed with refractive members to project a semiconductor device pattern from a reticle surface onto a substrate wherein at least said first lens system includes one or more aspherical surface(s) which point to the reticle surface. <IMAGE>
IPC 1-7
IPC 8 full level
G02B 13/18 (2006.01); G02B 17/08 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR)
G02B 17/08 (2013.01 - EP); G02B 17/0892 (2013.01 - EP); G03F 7/2002 (2013.01 - EP); G03F 7/70225 (2013.01 - EP); G03F 7/7025 (2013.01 - EP); H01L 21/027 (2013.01 - KR)
Citation (search report)
- [A] EP 0604093 A1 19940629 - NIPPON KOGAKU KK [JP]
- [A] EP 0527043 A1 19930210 - NIPPON KOGAKU KK [JP]
- [DA] EP 0608572 A2 19940803 - SVG LITHOGRAPHY SYSTEMS INC [US]
- [A] US 5140459 A 19920818 - SAGAN STEPHEN F [US]
- [A] EP 0554994 A1 19930811 - SVG LITHOGRAPHY SYSTEMS INC [US]
- [A] PATENT ABSTRACTS OF JAPAN vol. 017, no. 241 (E - 1364) 14 May 1993 (1993-05-14)
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0816892 A2 19980107; EP 0816892 A3 19990609; JP H103039 A 19980106; KR 980005325 A 19980330
DOCDB simple family (application)
EP 97110124 A 19970616; JP 15377096 A 19960614; KR 19970021291 A 19970528