EP 0817231 A3 19981216 - Shadow mask manufacturing method, shadow mask manufacturing apparatus, and cleaning device used in the method and apparatus
Title (en)
Shadow mask manufacturing method, shadow mask manufacturing apparatus, and cleaning device used in the method and apparatus
Title (de)
Herstellungsverfahren und Gerät zur Herstellung einer Schattenmaske und eine bei diesen Verfahren und Vorrichtung benutzte Reinigungsvorrichtung
Title (fr)
Procédé et appareil pour le fabrication d'un masque d'ombre et dispositif de nettoyage utilisé dans le procédé et appareil pour la mise en oeuvre
Publication
Application
Priority
- JP 17228096 A 19960702
- JP 23552796 A 19960905
- JP 26644496 A 19961008
Abstract (en)
[origin: EP0817231A2] A shadow mask manufacturing method comprising the cleaning step performs rapid cleaning by spraying a cleaning solution, which is inert with respect to the band-like thin metal plate, upon upper and lower surfaces of the band-like thin metal plate and thereby generating cavitation near the surfaces of the band-like thin metal plate by using cavitation jet means, while regulating a position of the band-like thin metal plate and preventing the cleaning solution from leaking in a direction opposite to the conveyance direction of the band-like thin metal plate by using a first leakage-preventing seal unit provided upstream the cavitation jet means. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 9/14 (2006.01)
CPC (source: EP KR US)
C23F 1/02 (2013.01 - EP US); C23F 1/28 (2013.01 - EP US); H01J 9/142 (2013.01 - EP US); H01J 9/20 (2013.01 - KR); H01J 2209/017 (2013.01 - EP US)
Citation (search report)
- [A] EP 0521721 A2 19930107 - DAINIPPON PRINTING CO LTD [JP]
- [A] EP 0314110 A2 19890503 - TOSHIBA KK [JP]
- [A] US 5326663 A 19940705 - TANAKA HIROSHI [JP], et al
- [A] US 5118357 A 19920602 - SABATKA WINSTON E [US]
- [A] GB 2143254 A 19850206 - SCHLOEMANN SIEMAG AG
- [A] EP 0443380 A2 19910828 - NEUMANN IND INC [US]
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0817231 A2 19980107; EP 0817231 A3 19981216; EP 0817231 B1 20031008; CN 1123039 C 20031001; CN 1175074 A 19980304; DE 69725391 D1 20031113; DE 69725391 T2 20040722; KR 100224938 B1 19991015; KR 980011578 A 19980430; MY 125759 A 20060830; TW 373222 B 19991101; US 6193897 B1 20010227
DOCDB simple family (application)
EP 97110866 A 19970701; CN 97117133 A 19970702; DE 69725391 T 19970701; KR 19970031627 A 19970702; MY PI9702973 A 19970701; TW 86109050 A 19970627; US 88745697 A 19970702