EP 0819263 A1 19980121 - METHOD FOR MAKING A TFT ACTIVE MATRIX FOR A PROJECTION SYSTEM SCREEN
Title (en)
METHOD FOR MAKING A TFT ACTIVE MATRIX FOR A PROJECTION SYSTEM SCREEN
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER AKTIVEN TFT-MATRIX FÜR EIN PROJEKTIONSANZEIGESYSTEM
Title (fr)
PROCEDE DE FABRICATION DE MATRICE ACTIVE TFT POUR ECRAN DE SYSTEME DE PROJECTION
Publication
Application
Priority
- FR 9600521 W 19960405
- FR 9504187 A 19950407
Abstract (en)
[origin: WO9631799A1] A method for making a liquid crystal display active matrix with four masking levels where the control transistors are of the top-gate type. The resulting liquid crystal display is particularly suitable for use in projection display systems. The method comprises, inter alia, the steps of depositing and etching a first opaque level (1) on a transparent insulating plate (2); depositing an insulating transparent film (3); depositing and etching a transparent conductor (7); selectively depositing an ohmic contact then depositing an intrinsic semiconductor material and a gate insulator (8), and performing a first etching of the resulting assembly; depositing and etching an opaque conductive level (9); and performing a second etching of the semiconductor (7) and gate insulator (8) level using the mask of the opaque conductive level (9).
IPC 1-7
IPC 8 full level
G02F 1/136 (2006.01); G02F 1/1362 (2006.01); G02F 1/1368 (2006.01); H01L 21/336 (2006.01); H01L 29/786 (2006.01); G02F 1/1335 (2006.01)
CPC (source: EP KR US)
G02F 1/136 (2013.01 - KR); G02F 1/136209 (2013.01 - EP US); G02F 1/1368 (2013.01 - EP US); G02F 1/133512 (2013.01 - EP US); G02F 1/136213 (2013.01 - EP US)
Citation (search report)
See references of WO 9631799A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9631799 A1 19961010; AU 5504496 A 19961023; EP 0819263 A1 19980121; FR 2732781 A1 19961011; FR 2732781 B1 19970620; JP H11503839 A 19990330; KR 19980703742 A 19981205; US 6174745 B1 20010116
DOCDB simple family (application)
FR 9600521 W 19960405; AU 5504496 A 19960405; EP 96912073 A 19960405; FR 9504187 A 19950407; JP 53004896 A 19960405; KR 19970707142 A 19971007; US 93084397 A 19971007