EP 0829645 A3 19981111 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
JP 26352396 A 19960912
Abstract (en)
[origin: EP0829645A2] In order to improve the exhaust performance of the turbomolecular pump comprising an exhaust stage, intermediate stage, and compression stage formed in sequence by rotor blades and the stator blades to effect exhaust and compression of gas, and rotor blades 141 to 144 are installed to a rotor shaft 12 supported by a bearing 20, and fixed stator blades 181 to 184 are arranged between the rotor blades, each vane of the rotor blade 144 forming the compression stage is arranged radially in a tilted manner with respect to the rotor shaft 12, and curved in the width direction so as to be convex to the rear side with respect to the vane rotation direction. Therefore, gas flows along the plate surface at the periphery of each vane 144b, so that the gas can be moved from the upper side to the lower side, thereby avoiding turbulence. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/32 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/324 (2013.01)
Citation (search report)
- [XY] US 5528618 A 19960618 - SCHLIE LAVERNE A [US], et al
- [Y] US 3826588 A 19740730 - FRANK R
- [Y] GB 580806 A 19460920 - ALAN ARNOLD GRIFFITH
- [Y] DE 7237362 U 19730111
- [X] GB 1019272 A 19660202 - SNECMA, et al
- [A] SU 1252552 A1 19860823 - NII PRIKLADNOJ MAT KIB PRI GO [SU]
- [A] US 4770574 A 19880913 - LOTZ HEINRICH [DE]
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0829645 A2 19980318; EP 0829645 A3 19981111; JP H1089284 A 19980407
DOCDB simple family (application)
EP 97306652 A 19970829; JP 26352396 A 19960912