EP 0830587 A1 19980325 - DEVICES FOR USE IN OPTICAL INVESTIGATION OF SURFACES OR SAMPLE HOLDERS AND METHOD FOR OPTICAL INVESTIGATION OF SAMPLE HOLDERS
Title (en)
DEVICES FOR USE IN OPTICAL INVESTIGATION OF SURFACES OR SAMPLE HOLDERS AND METHOD FOR OPTICAL INVESTIGATION OF SAMPLE HOLDERS
Title (de)
VORRICHTUNGEN ZUR OPTISCHEN UNTERSUCHUNG VON OBERFLÄCHEN ODER OBJEKTTRÄGERN UND VERFAHREN ZUR OPTISCHEN UNTERSUCHUNG VON OBJEKTTRÄGERN
Title (fr)
DISPOSITIFS POUR L'EXAMEN OPTIQUE DE SURFACES OU DE PORTE-ECHANTILLONS ET PROCEDE POUR L'EXAMEN OPTIQUE DE PORTE-ECHANTILLONS
Publication
Application
Priority
- DE 19520606 A 19950606
- EP 9602445 W 19960605
Abstract (en)
[origin: DE19520606A1] The proposed device for use in the optical investigation of surfaces, in particular object carriers, is provided with a line sensor (3) secured to a support (2) by at least one spacer unit (8). The line sensor is moved in a plane parallel to the plane of investigation by bending, tilting or pivoting the (minimum of one) spacer unit. Signals from the line sensor are evaluated to obtain data on the surface or plane.
IPC 1-7
IPC 8 full level
G01B 11/00 (2006.01); G01N 21/27 (2006.01); G01N 21/59 (2006.01)
CPC (source: EP US)
G01N 21/5911 (2013.01 - EP US)
Citation (search report)
See references of WO 9639621A1
Designated contracting state (EPC)
AT CH DE ES FR GB IT LI SE
DOCDB simple family (publication)
DE 19520606 A1 19961212; DE 19520606 B4 20040408; EP 0830587 A1 19980325; JP H11508034 A 19990713; US 6121599 A 20000919; WO 9639621 A1 19961212
DOCDB simple family (application)
DE 19520606 A 19950606; EP 9602445 W 19960605; EP 96917501 A 19960605; JP 50015097 A 19960605; US 95297998 A 19980306