EP 0830590 A1 19980325 - PH-SENSITIVE MICROSENSOR AND A METHOD OF MANUFACTURING IT
Title (en)
PH-SENSITIVE MICROSENSOR AND A METHOD OF MANUFACTURING IT
Title (de)
PH-SENSITIVER MIKROSENSOR, SOWIE VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
MICROCAPTEUR SENSIBLE AU PH ET PROCEDE DE FABRICATION ASSOCIE
Publication
Application
Priority
- DE 9601021 W 19960604
- DE 19520059 A 19950606
- DE 29512999 U 19950812
Abstract (en)
[origin: WO9639624A1] The invention concerns a pH-sensitive microsensor with sensor diaphragm. The latter is formed by laser ablation and can be produced by ablation from aluminium oxide or another material. This results in a sensor with very low drift.
IPC 1-7
IPC 8 full level
G01N 27/333 (2006.01); G01N 27/403 (2006.01); G01N 27/414 (2006.01)
CPC (source: EP)
G01N 27/333 (2013.01); G01N 27/3271 (2013.01)
Citation (search report)
See references of WO 9639624A1
Designated contracting state (EPC)
AT BE CH DE FR GB LI NL SE
DOCDB simple family (publication)
DOCDB simple family (application)
DE 9601021 W 19960604; EP 96915992 A 19960604